Laser oscillating apparatus
AssigneesCanon Kabushiki Kaisha, Tadahiro Ohmi
InventorsTadahiro Ohmi, Nobumasa Suzuki, Hiroshi Ohsawa, Nobuyoshi Tanaka, Toshikuni Shinohara, Masaki Hirayama
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Abstract
A plasma is excited uniformly as a whole over the length of each slot. A laser oscillating apparatus is designed to excite a laser gas in a laser tube (2) by introducing electromagnetic waves into the laser tube through a plurality of slots (10) formed in a waveguide wall and generate a laser beam by resonating the light generated from the laser gas. A least one electrode (13) is placed near the slot (10). By giving a predetermined current density to the electrode (13), the intensity distribution of light generated from the laser gas above the slot (10) is controlled.
Claims30
A laser oscillating apparatus comprising:
- a laser tube storing a laser gas;
- a waveguide arranged to transmit an electromagnetic wave into the laser tube through a slot formed in a wall of the waveguide so as to excite the laser gas to generate plasma;
- and
- electrodes located around the slot.
A laser oscillating apparatus comprising:
- a laser tube storing laser gas;
- a waveguide arranged to transmit an electromagnetic wave into the laser tube through a slot formed in a wall of the waveguide so as to excite the laser gas to generate plasma;
- and
- a light source arranged outside of the laser tube to irradiate the wall in which the slot is formed with light.
A laser oscillating apparatus comprising:
- a laser tube storing a laser gas;
- a waveguide arranged to transmit an electromagnetic wave into the laser tube through a slot formed in a wall of the waveguide;
- and
- an energy supply arranged to supply additional energy other than electromagnetic wave supplied via the waveguide to the laser gas such that the additional energy supplied to the laser gas is higher at an end portion of the slot than at a central portion of the slot.
Dependencies are inferred from the claim text.