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US 6,650,676 B2Granted
Gas laser apparatus
AssigneeNidek Co., Ltd.
InventorKazunobu Kojima
Life of this patent
Estimating the term…
Abstract
A gas laser apparatus includes a chamber in which laser medium gas is sealingly filled; a pair of main discharge electrodes arranged opposite to each other in the chamber; and a fan disposed in the chamber; wherein the chamber has an inner wall of a substantially elliptic shape in a plane perpendicular to a lengthwise direction of the chamber, and a part of the inner wall being between the fan and the main discharge electrodes serves as a guide for guiding the gas made to flow by the fan toward the main discharge electrodes.
Claims7
A gas laser apparatus including:
- a chamber in which laser medium gas is sealingly filled, the chamber having an upper section that houses a pair of main discharge electrodes arranged opposite to each other and a lower section, the lower section of the chamber having an inner wall of a substantially elliptic shape in a cross-section perpendicular to a lengthwise direction of the main discharge electrodes, and the inner wall of the lower section having, at a portion nearer to the upper section, a different shape in the cross-section from the elliptic shape, the upper section and the lower section being connected to each other;
- a fan disposed in the lower section of the chamber;
- and
- a pair of restriction plates disposed in the lower section of the chamber which define a flow pattern of the gas propelled by the fan past the discharge electrodes.
1 more element
A gas laser apparatus including:
- a chamber in which laser medium gas is sealingly filled, the chamber having an upper section housing a pair of main discharge electrodes arranged opposite to each other and a lower section, the lower section of the chamber having an inner wall of a substantially elliptic shape in a cross-section perpendicular to a lengthwise direction of the main discharge electrodes, and the inner wall of the lower section having, at a nearer portion to the upper section, a different shape in the cross-section from the elliptic shape, the upper section and the lower section being connected to each other;
- a fan disposed close to the inner wall of the lower section of the chamber;
- a first restriction plate disposed between the fan and the upper section in the lower section of the chamber, which forms a first flow of the gas flowing from the fan toward the main discharge electrodes;
- and
- a second restriction plate arranged in almost symmetric relation to the first restriction plate about a center line of the chamber, which forms a second flow of the gas flowing from the upper section toward a bottom of the lower section.
2 more elements
Dependencies are inferred from the claim text.