Microcomponent including a capacitive component
AssigneeMemscap
InventorsBertrand Guillon, Pierre Blondy
Life of this patent
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Abstract
A microcomponent which includes a capacitive component, of at least two elementary capacitors (C1, C2, C3, C4) which are connected in series. Each elementary capacitor is made up of two plates namely: a plate (10) fixed with respect to the rest of the microcomponent; and a second plate (12), part of which is capable of being displaced with respect to the first fixed plate (10) due to the effect of a control signal, so as to vary the value of the capacitance of the elementary capacitor C1. The control signals for the various elementary capacitors are generated independently so as to vary the overall capacitance of the capacitor by independent variation of the capacitances of each elementary capacitor.
Claims9
A microcomponent including a capacitive component, wherein the capacitive component consists of at least three elementary capacitors (C1, C2, C3, C4) connected in series, each elementary capacitor comprising:
- a plate (10) fixed with respect to the rest of the microcomponent;
- a second plate (12), part (19) of which is capable of being displaced with respect to the fixed plate (10) due to the effect of a control signal, so as to vary the value of the capacitance of the elementary capacitor C1;
- wherein the second plate (12) forms an arch straddling the fixed plate (10), said arch having a deformable central part (19) capable of moving toward the fixed plate due to the effect of the control signal,
- and wherein the control signals for the at least three elementary capacitors are generated independently so as to vary the overall capacitance of the capacitor by independent variation of the capacitances of each elementary capacitor.
Dependencies are inferred from the claim text.