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US 6,650,043 B1Granted
Multilayer conductor structure for use in field emission display
AssigneeMicron Technology, Inc.
InventorAmmar Derraa
Life of this patent
Estimating the term…
Abstract
The disclosed multilayer conductor may be used in place of aluminum conductive lines in integrated circuits and field emission displays. The multilayer conductor includes a primary conductive line, preferably made from aluminum, and a protective line, preferably made from chromium. The protective line separates the aluminum from adjacent silicon-based layers.
Claims31
A structure for use in a field emission display including;
- a substrate;
- a multiplicity of emitters disposed over the substrate;
- a dielectric layer disposed over the substrate;
- a conductive grid layer disposed over the dielectric layer;
- a conductor disposed between the substrate and the dielectric layer, the conductor being electrically coupled to at least one of the emitters, the conductor including a first portion comprising aluminum and a second portion comprising chromium, such that at least some of the aluminum is adjacent at least some of the chromium.
2 more elements
A structure for use in a field emission display including:
- a substrate;
- a multiplicity of emitters disposed over the substrate;
- a dielectric layer disposed over the substrate;
- a conductive grid layer disposed over the dielectric layer;
- and
- a conductor disposed between the substrate and the dielectric layer, the conductor being electrically coupled to at least one of the emitters, the conductor including a first portion comprising aluminum and a second portion comprising chromium, the second portion of the conductor being disposed between the substrate and the first portion of the conductor, the conductor further including a third portion comprising chromium, the third portion of the conductor being disposed between the dielectric layer and the first portion of the conductor.
3 more elements
A structure for use in a field emission display including:
- a substrate;
- a multiplicity of emitters disposed over the substrate;
- a dielectric layer disposed over the substrate;
- a conductive grid layer disposed over the dielectric layer;
- a conductor disposed between the substrate and the dielectric layer, the conductor being electrically coupled to at least one of the emitters, the conductor including a first portion comprising aluminum and a second portion comprising chromium. the second portion of the conductor being disposed between the dielectric layer and the first portion of the conductor.
2 more elements
A structure for use in a field emission display including:
- a substrate;
- a multiplicity of emitters disposed over the substrate;
- a dielectric layer disposed over the substrate;
- a conductive grid layer disposed over the dielectric layer, the conductive grid layer including a first portion comprising aluminum and a second portion comprising chromium, the second portion of the grid layer being disposed between the dielectric layer and the first portion of the grid layer;
- a conductor disposed between the substrate and the dielectric layer, the conductor being electrically coupled to at least one of the emitters, the conductor including a first portion comprising aluminum and a second portion comprising chromium.
2 more elements
A structure for use in a field emission display including:
- a substrate;
- a multiplicity of emitters disposed over the substrate;
- a dielectric layer disposed over the substrate;
- a conductor disposed between the substrate and the dielectric layer;
- a conductive grid layer disposed over the dielectric layer, the conductive grid layer including a first portion comprising aluminum and a second portion comprising chromium, the second portion of the grid layer being disposed between the dielectric layer and the first portion of the grid layer.
2 more elements
A structure for use in a field emission display including:
- a substrate;
- a dielectric layer disposed over the substrate, the dielectric layer defining a multiplicity of apertures;
- a multiplicity of emitters, each of the emitters corresponding to one of the apertures, each emitter being disposed over the substrate within its corresponding aperture;
- a conductive grid layer disposed over the dielectric layer;
- a conductor disposed between the substrate and the dielectric layer, the conductor being electrically coupled to at least one of the emitters, the conductor including a first line, a second line, and a third line, at least a portion of the first line being disposed between the second line and the substrate, at least a portion of the third line being disposed between the second line and the dielectric layer, the second line comprising aluminum, the first and third lines comprising chromium.
2 more elements
A structure for use in a field emission display including:
- a substrate;
- a dielectric layer disposed over the substrate, the dielectric layer defining a multiplicity of apertures;
- a multiplicity of emitters, each of the emitters corresponding to one of the apertures, each emitter being disposed over the substrate within its corresponding aperture;
- a conductive grid layer disposed over the dielectric layer, the conductive grid layer including a first line and a second line, the first line being disposed between the second line and the dielectric layer, the second line comprising aluminum, the first line comprising chromium.
1 more element
A field emission display including:
- a faceplate;
- a baseplate including;
- a substrate;
- a multiplicity of emitters disposed over the substrate;
- a dielectric layer disposed over the substrate;
- a lower conductor electrically coupled to at least one of the emitters, the lower conductor including a first portion comprising aluminum and a second portion comprising chromium, such that at least some of the aluminum is adjacent at least some of the chromium;
- an upper conductor disposed over the dielectric layer, the upper conductor including a first portion comprising aluminum and a second portion comprising chromium, the at least one emitter emitting electrons that travel towards the faceplate in response to voltages applied to the lower conductor, the upper conductor, and the faceplate.
4 more elements
A structure for use in a field emission display including:
- a substrate;
- a multiplicity of emitters disposed over the substrate;
- a dielectric layer disposed over the substrate;
- a conductive grid layer disposed over the dielectric layer;
- a conductor disposed between the substrate and the dielectric layer, the conductor being electrically coupled to at least one of the emitters, the conductor including a first conductive material and a second conductive material, the first conductive material comprising chromium and the second conductive material comprising aluminum, such that at least some of the aluminum is adjacent at least some of the chromium.
2 more elements
A structure for use in a field emission display including:
- a substrate;
- a multiplicity of emitters disposed over the substrate;
- a dielectric layer disposed over the substrate;
- a conductive grid layer disposed over the dielectric layer;
- a conductor disposed between the substrate and the dielectric layer, the conductor being electrically coupled to at least one of the emitters, the conductor including a first conductive material and a second conductive material, the first conductive material comprising chromium, a layer of the first conductive material being disposed between the dielectric layer and the second conductive material.
2 more elements
A structure for use in a field emission display including:
- a substrate;
- a multiplicity of emitters disposed over the substrate;
- a dielectric layer disposed over the substrate;
- a conductor disposed between the substrate and the dielectric layer;
- a conductive grid layer disposed over the dielectric layer, the conductive grid layer including a first conductive material and a second conductive material, wherein the first conductive material comprises chromium, a layer of the first conductive material being disposed between the second conductive material and the dielectric layer.
2 more elements
Dependencies are inferred from the claim text.