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US 6,649,999 B2Granted
Semiconductor chip configuration with a layer sequence with functional elements contacted by contact pads
AssigneeInfineon Technologies AG
InventorGerd Frankowsky
Life of this patent
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Abstract
In a semiconductor chip, conductive tracks run in a rewiring layer from contact pads to contact elevations. The contact pads are formed as vias. The conductive tracks are constructed in sections as bottom electrodes of trimming capacitors. The top electrode of the trimming capacitors is formed by a metal plane of the rewiring layer.
Claims4
A semiconductor chip configuration, comprising:
- a substrate carrying a layer sequence with electronic functional elements and including a rewiring layer on said substrate;
- contact pads formed as vias connected to said functional elements;
- contact elevations;
- conductive tracks extending in said rewiring layer from said contact pads to said contact elevations;
- a plurality of capacitors;
- each of said conductive tracks widening in a portion remote from the respective said via to form a bottom electrode of a respective capacitor of said plarality of capacitors to which said via is connected;
- and
- said respective capacitor further including an insulation layer arranged over said bottom electrode, and a top electrode above said insulation layer.
5 more elements
Dependencies are inferred from the claim text.