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US 6,649,989 B2Granted
Micromechanical diaphragm
AssigneeRobert Bosch GmbH
InventorsHubert Benzel, Frank Schaefer
Life of this patent
Estimating the term…
Abstract
A micromechanical diaphragm is described which has a partially n-doped p-substrate on its surface and a top n-epitaxial layer, one or more n-epitaxial layers which are p-doped in the diaphragm area being arranged on the p-substrate.
Claims20
A micromechanical diaphragm, comprising:
- a partially n-doped p-substrate including a surface;
- a topmost layer including an n-epitaxial layer being arranged on the partially n-doped p-substrate;
- and
- at least one other n-epitaxial layer that is p-doped in a diaphragm area and is arranged on the partially n-doped p-substrate.
1 more element
The diaphragm according to clam 1, wherein:
- n-doped areas and p-doped areas, always in alternation with the at least one other n-epitaxial layer, are arranged at least one of side by side and symmetric to a center of the micromechanical diaphragm.
A micromechanical diaphragm, comprising:
- a p-type substrate having a surface;
- n-type regions on the surface of the substrate;
- a topmost layer including an n-type epitaxial layer over the surface;
- and
- at least one other n-type epitaxial layer having a p-type region in a diaphragm area over the surface.
2 more elements
Dependencies are inferred from the claim text.