Self-aligned, planarized thin-film transistors, devices employing the same
AssigneeInternational Business Machines Corporation
InventorsLouis L. Hsu, Jack Allan Mandelman, William Robert Tonti, Li-Kong Wang
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AssigneeInternational Business Machines Corporation
InventorsLouis L. Hsu, Jack Allan Mandelman, William Robert Tonti, Li-Kong Wang
Estimating the term…
A semiconductor device is presented which includes a self-aligned, planarized thin-film transistor which can be used in various integrated circuit devices, such as static random access memory (SRAM) cells. The semiconductor device has a first field-effect transistor and a second field-effect transistor. The second field-effect transistor overlies the first field-effect transistor, and the first field-effect transistor and the second field-effect transistor share a common gate. The second field-effect transistor includes a source and a drain which are self-aligned to the shared gate in a layer of planarized seminconductor material above the first field-effect transistor. In one embodiment, the second field-effect transistor is a thin-film transistor, and the shared gate has a U-shape wrap-around configuration at a body of the thin-film transistor.
A semiconductor device comprising:
A semiconductor device comprising:
A semiconductor device comprising:
A semiconductor device comprising:
Dependencies are inferred from the claim text.