Methods of calibrating a position measurement device
OwnerAmos Talmiinventor
Life of this patent
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Abstract
A method of calibrating a position measurement device which device utilizes signals from a plurality of detectors, more than two of which view at least one edge between a dark region and a light region at any one position, comprising: measuring the signals of the plurality of detectors at a plurality of positions with respect to the edge; and calculating at least one average of some of the measured signals from individual ones of the detectors that do not view the edge at the position; and calibrating the individual detectors based on averages.
Claims27
A method of calibrating a position measurement device which device utilizes signals from a plurality of detectors, more than two of which view at least one edge between a dark region and a light region at any one position, comprising:
- measuring the signals of the plurality of detectors at a plurality of positions with respect to the edge;
- and
- calculating at least one average of some of the measured signals from individual ones of the detectors that do not view the edge at the position;
- and
- calibrating the individual detectors based on averages.
A method of calibrating a position measurement device which device utilizes signals from a plurality of detectors, more than two of which view at least one edge between a dark region and a light region at any one position, comprising:
- measuring the signals of the plurality of detectors at a plurality of positions with respect to the edge;
- and
- determining estimated positions of detectors that views both light and dark area at a given position;
- determining a most likely actual position for the given position;
- and
- determining correction factors for the positions determined by the individual detectors, based on the difference between the most likely position and the estimated positions.
Dependencies are inferred from the claim text.