Positional deviation detecting method and device manufacturing method using the same

A method of detecting a relative positional deviation between a first object and a second object, opposed to each other, with respect to a predetermined direction by use of a first alignment mark provided on the first object and a second alignment mark provided on the second object, said method comprising:

• a first step for providing the first alignment mark by use of a first grating lens, a fifth grating lens, a second grating lens having a mirror image of the first grating lens, and a sixth grating lens having a mirror image of the fifth grating lens;
• a second step for providing the second alignment mark by use of a third grating lens, a seventh grating lens, a fourth grating lens having a mirror image of the third grating lens, and an eighth grating lens having a mirror image of the seventh grating lens;
• a third step for detecting an incidence position of first light coming via the first grating lens and the third grating lens and incident upon a first predetermined plane;
• a fourth step for detecting an incidence position of second light coming via the second grating lens and the fourth grating lens and incident upon the first predetermined plane;
• a fifth step for detecting an incidence position of third light coming via the fifth grating lens and the seventh grating lens and incident upon a second predetermined plane;
• a sixth step for detecting an incidence position of fourth light coming via the sixth grating lens and the eighth grating lens and incident upon the second predetermined plane;
• and
• a seventh step for detecting a relative positional deviation between the first and second objects in the predetermined direction, on the basis of an average position of incidence positions of the first and fourth lights and an average position of incidence positions of the second and third lights.

A method of detecting a relative positional deviation between a first object and a second object, opposed to each other, with respect to a predetermined direction by use of a first alignment mark provided on the first object and a second alignment mark provided on the second object, said method comprising:

• a first step for providing the first alignment mark by use of a first grating lens, a fifth grating lens, a second grating lens having a mirror image of the first grating lens, and a sixth grating lens having a mirror image of the fifth grating lens;
• a second step for providing the second alignment mark by use of a third grating lens, a seventh grating lens, a fourth grating lens having a mirror image of the third grating lens, and an eighth grating lens having a mirror image of the seventh grating lens;
• a third step for detecting an incidence position of first light coming via the first grating lens and the third grating lens and incident upon a first predetermined plane;
• a fourth step for detecting an incidence position of second light coming via the second grating lens and the fourth grating lens and incident upon a second predetermined plane;
• a fifth step for detecting an incidence position of third light coming via the fifth grating lens and the seventh grating lens and incident upon a third predetermined plane;
• a sixth step for detecting an incidence position of fourth light coming via the sixth grating lens and the eighth grating lens and incident upon a fourth predetermined plane;
• and
• a seventh step for detecting a relative positional deviation between the first and second objects in the predetermined direction, on the basis of an average position of incidence positions of the first and second lights and an average position of incidence positions of third and fourth lights.