Method of forming regular array of microscopic structures on a substrate
AssigneeEver 1391 Limited
InventorsJames Kenneth Snowdon, Marcus Matthias Batzill, François Bardou
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Abstract
A method of forming a substantially regular array of microscopic structures on a surface of a sample (4) is described. The sample comprises a microscopic layer of at least one first material on a substrate of a second material, wherein the microscopic layer is sufficiently thin that stress fields at the interface of the microscopic layer and the substrate cause formation of separated regions of the first material on the substrate. The microscopic layer on the sample (4) is irradiated by means of a particle beam (5) at an acute angle α, to influence the direction of alignment of said separated regions and/or the relative position of adjacent said separated regions.
Claims19
A method of forming a substantially regular array of structures on a substrate, the method comprising:
- providing a surface layer of a first material on a substrate of a second material, wherein said surface layer is sufficiently thin that stress fields at the interface of said surface layer and said substrate cause formation of separated regions of said first material on said substrate;
- and
- directing at least one first particle beam onto said surface layer and at a respective acute angle thereto to influence the direction of alignment of said separated regions and/or the relative position of adjacent said separated regions.
Dependencies are inferred from the claim text.