Methods of forming physical vapor deposition target/backing plate assemblies
AssigneeHoneywell International Inc.
InventorsRon D. Kohler, Matthew S. Cooper
Life of this patent
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Abstract
The invention encompasses PVD target/backing plate assemblies which include a PVD target having a surface, and a bonding layer on the surface. The bonding layer has a different composition than the target surface, and a backing plate is provided to be separated from the PVD target surface by at least the bonding layer. The bonding layer forms a strong diffusion bond to the target. The invention also includes methods of forming PVD target/backing plate assemblies. Additionally, the invention includes assemblies in which one or more of titanium, zirconium, and copper is incorporated into a bonding layer between a target and a backing plate in a physical vapor deposition target/backing assembly.
Claims27
A method of forming a PVD target/backing plate assembly, comprising:
- forming a bonding layer on a surface of the PVD target and forming a strong diffusion bond between the bonding layer and the target in less than or equal to about 24 hours at a temperature of less than or equal to about 500° C.;
- the forming the bonding layer comprising coating the bonding layer onto the surface by ion deposition;
- the strong diffusion bond forming during the ion deposition;
- forming a passivating layer on the bonding layer;
- forming a layer of solder on the passivating layer;
- and
- joining a backing plate to the target, the joining the backing plate to the target comprising bonding the backing plate with the solder, the backing plate being joined through a connection that includes at least the bonding layer and accordingly being separated from the PVD target surface by at least the bonding layer.
A method of forming a PVD target/backing plate assembly, comprising:
- forming a bonding layer on a surface of the PVD target, the bonding layer comprising one or both of zirconium and titanium;
- and
- joining a backing plate to the target;
- the backing plate being joined through a connection that includes at least the bonding layer and accordingly being separated from the PVD target surface by at least the bonding layer.
Dependencies are inferred from the claim text.