FeCoNiN-based soft magnetic thin film composition
AssigneeKorea Institute of Science and Technology
InventorsHi Jung Kim, Suk Hee Han, Ki Hyeon Kim, Yun Myung Kim
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Abstract
Disclosed is a FeCoNiN-based soft magnetic thin film composition having the formula FexCoyNizNv, wherein x, y, z and v are expressed in at % and satisfy 41≦x≦55, 18≦y≦27, 19≦z≦32, 0<v≦5, and x+y+z+v=100. The Fe-based ultrafine crystalline soft magnetic thin film composition is prepared by the more simplified method and much more excellent soft magnetic properties in the high-frequency than the conventional soft magnetic thin film compositions.
Claims2
A FeCoNiN-based soft magnetic thin film composition having the formula FexCoyNizNv, wherein x, y, z and v are expressed in atom % and satisfy 44≦x≦52, 20≦y≦24, 23≦z≦32, 2<v≦5, and x+y+z+v=100.
Dependencies are inferred from the claim text.