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US 6,649,281 B2Granted
Voltage variable metal/dielectric composite structure
AssigneeRaytheon Company
InventorWilliam H. Henderson
Life of this patent
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Abstract
A voltage variable composite structure comprising: a first layer of metal; a second layer of low-loss dielectric material impregnated with an array of first metal vias; a third layer of a voltage variable dielectric material; a fourth layer of a patterned thin metallic film; a fifth layer of low-loss dielectric material impregnated with an array of second metal vias; and a sixth layer of metal.
Claims16
A voltage variable composite structure comprising:
- a) a first layer of metal;
- b) a second layer of low-loss dielectric material impregnated with an array of first metal vias;
- said first layer joined-to the top of said second layer;
- c) a third layer of a voltage variable dielectric material joined to the bottom of said second layer;
- d) a fourth layer of metal capacitors joined to the bottom of said third layer;
- e) a fifth layer of low-loss dielectric material impregnated with an array of second metal vias;
- said fifth layer joined to the bottom of said fourth layer;
- and
- f) a sixth layer of metal joined to the bottom of said fifth layer.
6 more elements
A voltage variable composite structure comprising a square lattice of unit cells of height H, width W and length L, each unit cell comprising:
- a) a first layer of metal;
- b) a second layer of low-loss dielectric material with a first metal via, traversing the entire thickness of said low-loss dielectric material;
- said first layer joined to the top of said second layer;
- said low-loss dielectric material having a dielectric constant ∈substrate;
- c) a third layer of a voltage variable dielectric material joined to the bottom of said second layer;
- said voltage variable dielectric material having a dielectric constant ∈VVD and a thickness T;
- d) a fourth layer of a patterned thin metallic film;
- said patterned thin metallic film comprising a metal capacitor connected to a first metal contact and a second metal contact;
- said capacitor having a width Wid and a gap G;
- said fourth layer joined to the bottom of said third layer so that said first metal via is positioned adjacent said first metal contact;
- e) a fifth layer of low-loss dielectric material impregnated with a second metal via, traversing the entire thickness of said low-loss dielectric material;
- said fifth layer joined to the bottom of said fourth layer so that said second metal via contacts said second metal contact;
- said low-loss dielectric material having a dielectric constant ∈substrate;
- and
- f) a sixth layer of metal joined to the bottom of said fifth layer;
- the dimensions of said structure being selected to produce an effective dielectric constant ∈eff in accordance with the following formulae:
- ∈eff=∈substrate+Cap*H(W*L)
- Cap=∈VVD*Wid*T/G
15 more elements
Dependencies are inferred from the claim text.