SiC jig for use in heat treatment
AssigneesNGK Insulators, Ltd., NGK Adrec Co., Ltd.
InventorsToshiharu Kinoshita, Shigeru Ogura
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Abstract
There is provided a jig for use in heat treatment onto which a vitreous plate having had films exhibiting respective given functions formed on its surface is to be loaded when the vitreous plate undergoes heat treatment. The jig contains 50% by weight or more phase containing SiC, its thermal conductivity is 10 W/mK or more, its apparent porosity 0.2 to 25%, and in that its coefficient of thermal expansion is 3.8×10−6/°C. to 5.5×10−6/°C.
Claims9
A SiC jig for treatment of a vitreous plate having films exhibiting respective given functions a surface of the vitreous plate, wherein the SiC jig comprises 50% or more by weight of a phase consisting essentially of SiC, the jig having (1) a thermal conductivity of W/mK or more, (2) an apparent porosity of 0.2 to 25%, and (3) a coefficient of thermal expansion of 3.8×10−6/° C. to 5.5×10−6/° C.
A SiC ceramic comprising 50% or more by weight of a phase consisting essentially of SiC, the SiC ceramic having (1) a thermal conductivity of 10 W/mK or more, (2) an apparent porosity of 0.2 to 25%, and (3) a coefficient of thermal expansion of 3.8×10−6/° C. to 5.5×10−6/° C.
Dependencies are inferred from the claim text.