Bubble-jet type ink-jet print head and manufacturing method thereof
AssigneeSamsung Electronics Co., Ltd.
InventorsChung-jeon Lee, Jae-ho Moon, O-keun Kwon
Life of this patent
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Abstract
A bubble-jet type ink jet printhead and manufacturing method thereof are provided. In the printhead, a manifold for supplying ink and a concave ink chamber is integrated with a substrate by being recessed from the same surface of the substrate, and a nozzle palate on the substrate in which a nozzle is formed and a round-shaped heater surrounding the nozzle are integrated without a complex process such as bonding. Thus, this simplifies the manufacturing procedure and facilitates high volume production. Furthermore, the round-shaped heater forms a doughnut-shaped bubble to eject ink, thereby preventing a back flow of ink as well as formation of satellite droplets which may degrade image resolution.
Claims22
A method of manufacturing a bubble-jet type ink jet printhead, the method comprising the steps of:
- forming an insulating layer on the surface of a substrate;
- forming a round-shaped heater on the insulating layer;
- forming electrodes electrically connected with the round-shaped heater on the insulating layer;
- etching said insulating layer to form a opening for an ink chamber and an opening for a manifold, said opening for said ink chamber having a diameter less than that of said round-shaped heater and being located inside said round-shaped heater, said opening for said manifold being located outside said round-shaped heater;
- etching said substrate using said insulating layer having said openings as an etch mask to form an ink chamber having a diameter greater than that of the round-shaped heater wherein said ink chamber resulting in a concave shape, and said manifold;
- and
- depositing a protective layer over said insulating layer, said protective layer covering said opening for said manifold, said protective layer being perforated by a hole, said hole overlapping said opening in said insulating layer for said ink chamber producing a nozzle hole.
A method of manufacturing a bubble-jet type ink jet printhead, the method comprising the steps of:
- forming an insulating layer on the surface of a substrate;
- forming a round-shaped heater on the insulating layer;
- etching, via a first etch, said insulating layer to expose said substrate at a first area for an ink chamber and a second area next to the first area for a manifold using simultaneously;
- etching, via a second etch, said substrate using said insulating layer having said exposed substrate areas as an etch mask to form said manifold and said ink chamber simultaneously underneath where said second exposed area and said first exposed area of said substrate existed, said manifold and said ink chamber being etched into a same side of said substrate;
- and
- depositing a protective layer over said insulating layer, said protective layer covering an opening for said manifold and covering an opening for said ink chamber, said protective layer being perforated by a hole, said hole being disposed over a center of said ink chamber.
Dependencies are inferred from the claim text.