Calibration tool
AssigneeApplied Materials, Inc.
InventorsHimanshu J. Chokshi, Bharat Patel
Life of this patent
Estimating the term…
Abstract
Generally a method and apparatus for determining a position of an object is provided. In one embodiment, an apparatus includes a locating plate, a window and a camera. The camera is positioned to view the target through the window disposed in the locating plate. The position of an object viewed by the camera through the window by be resolved relative to the position of the locating plate. In other embodiments, the apparatus may be disposed in a processing system such as a chemical mechanical polisher to align components such as robots, load cups and polishing heads.
Claims34
Apparatus for determining a position of an object comprising:
- a locating plate;
- a window disposed in the locating plate, the window having an indicia disposed thereon;
- a camera positioned to view the indicia through the window;
- a monitor that displays an image viewed by the camera;
- a transmitter coupled to the camera;
- and
- a receiver coupled to the monitor, the receiver adapted to receive a signal broadcast by the transmitter.
Apparatus for determining a position of an object comprising:
- a locating plate having a flange adapted to simulate a substrate;
- a window disposed in the locating plate, the window having an indicia disposed thereon;
- and
- a camera positioned to view the indicia through the window.
Dependencies are inferred from the claim text.