Method of manufacturing a joint between metal and a ceramic substrate for a high temperature sensor
OwnerLeu-Wen Tsay, Ren-Kae Shiueinventors
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Abstract
A method of manufacturing a joint between metal and a ceramic substrate for a high temperature sensor. First, a predetermined hole is formed in the ceramic substrate to serve as a joint portion. A bonding layer is preferably disposed on the ceramic substrate to form on the inner surface and the surrounding portion of the hole. Next, the hole is filled with a supporting metal. Then, a conductive layer is formed on the supporting metal and the bonding layer. A metal signal conductive frame is then formed on the conductive layer. Next, a welding spot is formed through the metal signal conductive frame, the conductive layer and the supporting metal at the joint portion by a welding process.
Claims16
A method of manufacturing a joint between metal and a ceramic substrate for a high temperature sensor, comprising the steps of:
- forming a hole in the ceramic substrate to serve as a joint portion;
- disposing a bonding layer on the ceramic substrate to form on an inner surface and a surrounding portion of the hole;
- filling the hole with a supporting metal;
- forming a conductive layer on the supporting metal and the bonding layer;
- forming a metal signal conductive frame on the conductive layer;
- and
- forming a welding spot through the metal signal conductive frame, the conductive layer and the supporting metal at the joint portion by a welding process.
A method of manufacturing a joint between metal and a ceramic substrate for a high temperature sensor, comprising the steps of:
- forming a hole in the ceramic substrate to serve as a joint portion;
- filling the hole with a supporting metal;
- forming a conductive layer on the supporting metal;
- forming a metal signal conductive frame wire on the conductive layer;
- and
- forming a welding spot through the metal signal conductive frame, the conductive layer and the supporting metal at the joint portion by a welding process.
Dependencies are inferred from the claim text.