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US 6,648,201 B1Granted
Apparatus to reduce wasting of unused photoresist in semiconductor containers
AssigneeAdvanced Micro Devices, Inc.
InventorsVincent Marinaro, Ted Wakamiya, Gerry Peffer
Life of this patent
Estimating the term…
Abstract
The present invention provides for a geometrically shaped pouch and container system for use in the storage, handling and dispensing of liquid chemicals. This system will result in far greater liquid chemical utilization efficiencies.
Claims10
A semiconductor processing liquid containment apparatus comprising:
- a container having a mouth portion associated therewith;
- a pouch within the container for holding a semiconductor processing liquid therein, and having a mouth portion associated therewith secured to the mouth portion of the container, wherein a bottom portion of the container or the pouch is adapted to direct the semiconductor processing liquid within the pouch to a predetermined collection region;
- and
- a semiconductor processing liquid extraction member adapted to interface with the mouth portion of the container and the pouch wherein the semiconductor processing liquid extraction member comprises an extraction port adapted to reside within the predetermined collection region of the pouch,
- wherein the container further comprises:
- a top portion containing the mouth portion of the container;
- an enclosed sidewall portion coupled to the top portion and providing a sidewall support for the pouch therein, and;
- a bottom portion coupled to the enclosed sidewall portion opposite the top portion, the bottom portion comprising:
- a predetermined collection region support portion;
- and
- a geometrically shaped region extending from at least a portion of the enclosed sidewall portion to the predetermined collection region support portion, and adapted to direct the semiconductor processing liquid in the bottom portion of the pouch to the predetermined collection region,
- wherein the geometrically shaped region comprises an insert placed in the bottom portion of the container and defines the predetermined collection region support portion, the geometrically shaped region being flush with the enclosed sidewall portion.
9 more elements
Dependencies are inferred from the claim text.