Fluid control apparatus and gas treatment system comprising same
AssigneeFujikin Incorporated
InventorsHideki Fujimoto, Noboru Uzawa, Naoyuki Sato, Michio Yamaji, Shigeaki Tanaka, Yuji Kawano, Yasuyuki Omata, Masakazu Fukui
Life of this patent
Estimating the term…
Abstract
A fluid control apparatus comprises lines A1, A2, A3, A4, A5, B1, B2, B3 each removably attached to a substrate 1 by a plurality of brackets 8, 9, 18, 19, 20, and channel communication means 47, 48 which are removable upward.
Claims5
A fluid control apparatus comprising a plurality of lines (A1), (A2), (A3), (A4), (A5), (B1), (B2, (B3), arranged in parallel on a substrate (1) and having outlets oriented in the same direction, each of the lines (A1), (A2), (A3, (A4), (A5), (B1), (B2), (B3) comprising a plurality of fluid control devices (2), (3), (4), (5), (6) arranged at an upper level and a plurality of coupling members (11), (12), (13), (14), (15), (16), (17) arranged at a lower level, said lines including specified lines (B1), (B2), (B3) connected to one another by channel communication means (47), (48), the fluid control apparatus being characterized in that:
- each of the lines (A1), (A2), (A3), (A4), (A5), (B1), (B2), (B3) is removably attached to the substrate (1) by a plurality of brackets (8), (9), (18), (19), (20), the channel communication means (47), (48) being removable upward,
- wherein a manifold block coupling (40), (43) disposed at the lower level for connecting at least three of the lines (A1), (A2), (A3), (A4), (A5), (B1), (B2), (B3) is provided by on at least one of inlet side and outlet side and attached to the substrate (1) by a bracket (42).
A fluid control apparatus comprising a plurality of lines (A1), (A2), (A3), (A4), (A5), (B1), (B2), (B3) arranged in parallel on a substrate (1) and having outlets oriented in the same direction, each of the lines (A1), (2), (A3), (A4), (A5), (B1), (B2), (B3) comprising a plurality of fluid control devices (2), (3), (4), (5), (6), (7) arranged at an upper level and a plurality of coupling members (11), (12), (13), (14), (15), (16), (17) arranged at a lower level, said lines including specified lines (B1), (B2), (B3) connected to one another by channel communication means (47), (48), the fluid control apparatus being characterized in that:
- each of the lines (Al), (A2), (A3), (A4), (A5), (B1), (B2), (B3) is removably attached to the substrate (1) by a plurality of brackets (8), (9), (18), (19), (20), the channel communication means (47), (48) being removable upward,
- wherein the lines (A1), (A2), (A3), (A4), (A5), (B1), (B2), (B3) are lines (Al), (A2), (A3), (A4), (A5) having no bypass channel and lines (B1), (B2), (B3) each having a bypass channel, and the bypass-equipped lines (B1), (B2), (B3) each have a bypass pipe (35) for connecting an inlet side of a specified fluid control device (2) to an outlet side thereof above the fluid control device (2).
Dependencies are inferred from the claim text.