Absolute pressure sensor
AssigneeRosemount Inc.
InventorsDaniel S. Nelson, David J. Hillman, John McIntire
Life of this patent
Estimating the term…
Abstract
A barometric pressure sensor including a base layer, a sensor layer and a reference layer. The base layer has a passageway between a pressure inlet and a mounting face. The sensor layer is bonded by an insulating bond to the mounting face and includes a conductive diaphragm. The reference layer is mounted on the sensor layer to form a reference vacuum cavity. The reference layer includes a conducting surface facing the conductive diaphragm across the reference vacuum cavity to form a pressure sensing capacitor.
Claims25
An absolute pressure sensor, comprising:
- a base layer surrounding a passageway between an inlet adapted to receive a pressure and a mounting face on the base layer;
- a sensor layer having a first face bonded by an insulating bond to the mounting face, the sensor layer including a conductive diaphragm aligned with the passageway, forming a pressure cavity that is between the sensor layer and the base layer, the pressure cavity receiving the pressure;
- and
- a reference layer mounted on the sensor layer to form a reference vacuum cavity that is aligned with the conductive diaphragm, the reference layer including a conducting surface facing the conductive diaphragm across the reference vacuum cavity to form a pressure sensing capacitor, the conductive diaphragm separating the reference vacuum cavity from the pressure cavity, the conductive diaphragm sensing absolute pressure.
A gage pressure transmitter that includes a barometric pressure sensor, the barometric pressure sensor comprising:
- a base layer surrounding a passageway between an inlet adapted to receive a pressure and a mounting face on the base layer;
- a sensor layer having a first face bonded by an insulating bond to the mounting face, the sensor layer including a conductive diaphragm aligned with the passageway, forming a pressure cavity that is between the sensor layer and the base layer, the pressure cavity receiving the pressure;
- and
- a reference layer mounted on the sensor layer to form a reference vacuum cavity that is aligned with the conductive diaphragm, the reference layer including a conducting surface facing the conductive diaphragm across the reference vacuum cavity to form a pressure sensing capacitor, the conductive diaphragm separating the reference vacuum cavity from the pressure cavity, the conductive diaphragm sensing absolute pressure.
Dependencies are inferred from the claim text.