Tuning-fork type vibration gyro and electrode trimming method therefor
AssigneeFujitsu Media Devices Limited
InventorsKazuhiro Ohta, Masanori Yachi, Yoshitaka Takahashi, Kazutsugu Kikuchi, Keiji Saito
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AssigneeFujitsu Media Devices Limited
InventorsKazuhiro Ohta, Masanori Yachi, Yoshitaka Takahashi, Kazutsugu Kikuchi, Keiji Saito
Estimating the term…
A tuning-fork type vibration gyro enables to suppress pyroelectric noise caused by temperature change and to obtain sensor output having high signal-to-noise ratio. The tuning-fork type vibration gyro includes a tuning-fork type vibration body having two arms mutually disposed in parallel and a base for commonly supporting one end of the each arm, wherein a longitudinal direction of the two arms is defined as a z-axis and a perpendicular direction thereto is defined as an x-axis; driving electrodes respectively formed on the two arms for generating vibration of the two arms in a direction parallel to the x-axis; detecting electrodes respectively formed on the two arms for detecting electromotive force generated when the tuning-fork type vibration body is rotated around the z-axis; and dummy electrodes formed on the two arms in respective areas different from the driving electrodes and the detecting electrodes.
A tuning-fork type vibration gyro comprising:
A tuning-fork type vibration gyro comprising:
Dependencies are inferred from the claim text.