Device for contacting and/or modifying a surface having a cantilever and a method for production of said cantilever
AssigneeInternational Business Machines Corporation
InventorsMichel Despont, Ute Drechsler, Mark I. Lutwyche, Hugo E. Rothuizen, Peter Vettiger
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Abstract
A device for contacting and/or modifying a surface having a cantilever connected to an almost plane carrier element staying apart from said surface, said cantilever having a tip at its loose end being in close contact to said surface. It is proposed that the cantilever stand out of the plane of said carrier element. Further, a method for producing the cantilever having a tip at its loose end. The device is suitable for thermomechanical writing and thermal readout of binary information, lithographic and imaging techniques, and for surface modification.
Claims7
A method for producing a cantilever connected to a carrier element having a generally planar shape, said carrier element having a surface which defines a plane of said carrier element, said cantilever having a tip at its loose end being in close contact to said surface, comprising:
- bending said cantilever by inducing a controlled stress such that said cantilever stands out of the plane of said carrier element, wherein said bending is realized by inducing a controlled stress in the cantilever by a method selected from a group consisting of treating thermally said cantilever, stress control of the cantilever material deposition, and implantation of additional material in said cantilever.
A method for producing a cantilever connected to a carrier element having a generally planar shape, said carrier element having a surface which defines a plane of said carrier element, said cantilever having a tip at its loose end being in close contact to said surface, comprising:
- bending said cantilever by inducing a controlled stress such that said cantilever stands out of the plane of said carrier element, wherein manufacturing of said cantilever and forming of said tip takes place in the same process steps;
- and
- wherein said process steps comprise oxidation sharpening of a box-like silicon structure.
An apparatus for positioning a tip in close proximity to a surface, comprising:
- a cantilever having a fixed end, a loose end, and a tip attached to said loose end;
- and
- a carrier element having a generally planar shape, said carrier element having a surface which defines a plane of said carrier element, said carrier element being attached to said fixed end of said cantilever, said cantilever is bent out of the plane of said carrier element to position said tip of said cantilever proximate to the surface;
- wherein the cantilever is made of a material having an intrinsic stress which induces the cantilever to bend out of said plane;
- and
- wherein said intrinsic stress is provided by a thermal treatment of said cantilever.
An apparatus for positioning a tip in close proximity to a surface, comprising:
- a cantilever having a fixed end, a loose end, and a tip attached to said loose end;
- and
- a carrier element having a generally planar shape, said carrier element having a surface which defines a plane of said carrier element, said carrier element being attached to said fixed end of said cantilever, said cantilever is bent out of the plane of said carrier element to position said tip of said cantilever proximate to the surface;
- wherein the cantilever is made of a material having an intrinsic stress which induces the cantilever to bend out of said plane;
- and
- wherein said intrinsic stress is provided by implantation in the cantilever.
An apparatus for positioning a tip in close proximity to a surface, comprising:
- a cantilever having a fixed end, a loose end, and a tip attached to said loose end;
- and
- a carrier element having a generally planar shape, said carrier element having a surface which defines a plane of said carrier element, said carrier element being attached to said fixed end of said cantilever, said cantilever is bent out of the plane of said carrier element to position said tip of said cantilever proximate to the surface;
- and
- wherein said tip is provided on a side of said cantilever being turned away from a surface to be placed in close proximity and said cantilever being bent along its direction approximately 180° so that said tip can then be positioned over a surface.
A method for producing a cantilever, comprising the steps of:
- connecting a cantilever having a fixed end, a loose end, and a tip connected to said loose end to a carrier element which has a surface defining a plane of said carrier element;
- and
- bending said cantilever such that said cantilever is bent out of the plane of said carrier element;
- and
- wherein said bending is realized by inducing a controlled stress in the cantilever by including at least one of the following steps:
- thermally treating said cantilever;
- a stress control of the cantilever material deposition;
- and
- implantation of additional material in said cantilever.
Dependencies are inferred from the claim text.