Method for changing an electrical resistance of a resistor
AssigneeInternational Business Machines Corporation
InventorsArne W. Ballantine, Cyril Cabral, Jr., Daniel C. Edelstein, Anthony K. Stamper
Life of this patent
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Abstract
A method for changing an electrical resistance of a resistor. Initially, the resistor is provided, wherein the resistor has a length L and an electrical resistance R1. A portion of the resistor is exposed to a laser radiation, wherein the portion includes a fraction F of the length L of the resistor. After the resistor has been exposed to the laser radiation, the resistor has an electrical resistance R2, wherein R2 is unequal to R1.
Claims32
A method for changing an electrical resistance of a resistor, comprising:
- providing the resistor having a length L and a first electrical resistance R1;
- and
- exposing a portion of the resistor to a laser radiation for a time of exposure wherein the portion of the resistor includes a fraction F of the length L, wherein at an end of the time of exposure the resistor has a second electrical resistance R2, wherein R2 is unequal to R1, wherein after completion of said exposing the portion of the resistor to the laser radiation for the time of exposure, the portion of the resister continues to be comprised by the resistor and contributes to the second electrical resistance R2, wherein the resistor in the providing step includes a first layer and a second layer, wherein the first layer comprises a first electrically conductive material, wherein the second layer comprises a second electrically conductive material, wherein the first layer is in electrically conductive contact with the second layer, and wherein the exposing step causes a portion of the first electrically conductive material to react with a portion of the second electrically conductive material to form a cell of a third electrically conductive material within the portion of the resistor.
A method for changing an electrical resistance of a resistor, comprising:
- providing the resistor having a length L and a first electrical resistance R1;
- exposing a portion of the resistor to a laser radiation for a time of exposure, wherein the portion of the resistor includes a fraction F of the length L, wherein at an end of the time of exposure the resistor has a second electrical resistance R2, and wherein R2 is unequal to R1, wherein the resistor is coupled to a semiconductor substrate, wherein the substrate includes an insulator and a plate, wherein the insulator is disposed between the resistor and the plate, wherein the plate is capable of absorbing the laser radiation;
- and
- exposing the plate to a portion of the laser radiation, wherein the portion of the laser radiation does not pass through a total thickness of the plate.
A method for changing an electrical resistance of a resistor, comprising:
- providing the resistor having a length L and a first electrical resistance R1;
- exposing a portion of the resistor to a laser radiation for a time of exposure, wherein the portion of the resistor includes a fraction F of the length L, wherein at an end of the time of exposure the resistor has a second electrical resistance R2, and wherein R2 is unequal to R1, wherein the resistor is coupled to a semiconductor substrate;
- providing a predetermined target resistance in tennis of a value Rt and a tolerance ΔRt for the second electrical resistance;
- and
- testing the resistor after the exposing step to determine whether the second electrical resistance is within Rt±ΔRt, wherein after the testing step the second electrical resistance is not within Rt±ΔRt, and further comprising if (R2−R1) (R1−R2)>0 iterating such that each iteration of the iterating includes:
- additionally exposing the portion of the resistor to the laser radiation resulting in a new second electrical resistance R2′;
- additionally testing the resistor after the additionally exposing step to determine whether R2′ is within Rt±ΔRt, and ending the iterating if R2′ is within Rt±ΔRt or if (R2′−R1) (Rt−R2′)<0.
Dependencies are inferred from the claim text.