Method for controlling queue time constraints in a fabrication facility
AssigneeTaiwan Semiconductor Mfg. Co., Ltd.
InventorsLiang-Kai Huang, Span Lu, Ren-Chyi You, Kuang-Huan Hsu
Life of this patent
Estimating the term…
Abstract
An algorithm can be performed to control the dispatch of products in a fabrication or manufacturing facility. The queue time constraint tolerances and tool throughput are initialized for each product. Next the multiple processing demand time can be calculated for each product. The aggregating queue time constraint can then be calculated for each product. If the multiple processing demand time is less than the aggregating queue time constraint for each queue time limit tool, then any lot can be selected to be processed. Otherwise, the product at the given tool should be further processed.
Claims18
A method for determining which, if any, of a plurality of products should be introduced to a manufacturing system, the method comprising:
- initializing a relative throughput and a queue time constraint parameter for each product of the plurality of products;
- calculating an overall multiple processing demand time for each product;
- calculating an aggregating queue time constraint tolerance for each product;
- and
- determining which, if any, product can be introduced to the manufacturing system by comparing the multiple processing demand time to the aggregating queue time constraint.
A method of making a semiconductor device, the method comprising:
- processing the semiconductor device at a first tool;
- calculating a multiple processing demand time for the semiconductor device at a third tool;
- calculating a queue time constraint tolerance for the semiconductor device between the second tool and a third tool;
- dispatching the semiconductor device to the second tool if the multiple processing demand time is less than the queue time constraint;
- processing the semiconductor device at the second tool;
- and
- processing the semiconductor device at the third tool.
Dependencies are inferred from the claim text.