US 6,647,172 B2 · Imaging technique for use with optical MEMS devices

Abstract

Using an imaging system, an optical MEMS devices is imaged so that in combination with an actual one or more other optical MEMS devices, or images thereof, a single virtual optical MEMS device is formed that has the size of each of the optical MEMS devices combined. The physical size of the arrangement may be reduced by compacting the optical path, e.g., using appropriate conventional mirrors, and/or employing folded arrangements, i.e., arrangements in which there is only one MEMS device stage that does double duty for both input and output through the use of at least one conventional mirror. The imaging system may reproduce the angle of reflection of the light from the micro mirror, e.g., using a telecentric system. A prism may be employed to align the various optical MEMS devices, or images thereof.

Claims28

Dependent claims

An optical switch, comprising

a first micro-electromechanical system (MEMS) device containing a first number of micro mirrors;
a second MEMS device containing a second number of micro mirrors;
and
a first imaging system optically coupled to said first MEMS device at one optical end so as to produce an image of said first MEMS device at the optical end of said imaging system opposite to said optical end at which said first MEMS device is located;
wherein
(i) said image of said first MEMS device and
(ii) at least one of the set consisting of (a) said second MEMS device and (b) an image of said second MEMS device,
form a virtual MEMS device having a number of micro mirrors equal to the sum of said first and second numbers.

5 more elements

Dependencies are inferred from the claim text.

Imaging technique for use with optical MEMS devices

Life of this patent

Imaging technique for use with optical MEMS devices

Life of this patent

Abstract

Claims28