Low loss optical switching system

An apparatus for switching first and second optical signals, the apparatus comprising:

• a substrate;
• a movable microstructure formed by a semiconductor process on the substrate, the movable microstructure being suspended at a distance from the substrate and being adapted to move relative to the substrate;
• an actuator to cause the movable microstructure to move from a first position to a second position relative to the substrate;
• and
• a light-guiding structure mounted to the movable microstructure such that the light-guiding structure moves with the movable microstructure, the light-guiding structure including a first set of optical paths and a second set of optical paths, the first set of optical paths having a large radius of curvature which gradually changes the direction of the first or second optical signal, whereby when the movable microstructure is in a first position, the first and second optical signals travel along the first set of optical paths in the light-guiding structure, and when the movable microstructure is in a second position, the first and second optical signals travel along the second set of optical paths in the light-guiding structure.

An apparatus for switching a first and second optical signals, the apparatus comprising:

• a substrate;
• a rotatable microstructure formed by a semiconductor process on the substrate, the rotatable microstructure being suspended at a distance from the substrate and being adapted to rotate angularly relative to the substrate;
• an actuator to cause the rotatable microstructure to rotate from a first position to a second position relative to the substrate;
• and
• a light-guiding structure mounted to the rotatable microstructure such that the light-guiding structure moves with the rotatable microstructure, the light-guiding structure including a first set of optical paths and a second set of optical paths, the first set of optical paths having a large radius of curvature which gradually changes the direction of the first or second optical signal, whereby when the rotatable microstructure is in a first position, the first and second optical signals travel along the first set of optical paths in the light-guiding structure, and when the rotatable microstructure is in a second position, the first and second optical signals travel along the second set of optical paths in the light-guiding structure.

An optical switching system comprising:

• (a) an input port that receives a first optical signal;
• (b) a plurality of output ports;
• and
• (c) a plurality of optical switching devices coupled to receive the first optical signal and switch the first optical signal to one of the plurality of output ports, each optical switching device comprising:
• (i) a substrate;
• (ii) a movable microstructure formed by a semiconductor process on the substrate, the movable microstructure being suspended at a distance from the substrate and being adapted to move relative to the substrate;
• (iii) an actuator to cause the movable microstructure to move from a first position to a second position relative to the substrate;
• and
• (iv) a light-guiding structure mounted to the movable microstructure such that the light-guiding structure moves with the movable microstructure, the light-guiding structure including a first set of optical paths and a second set of optical paths, the first set of optical paths having a large radius of curvature which gradually changes the direction of the first optical signal, whereby when the movable microstructure is in a first position, the first optical signal travels along the first set of optical paths in the light-guiding structure, and when the movable microstructure is in a second position, the first optical signal travels along the second set of optical paths in the light-guiding structure.

An apparatus for switching a first optical signal to any one of two output ports, the apparatus comprising:

• a substrate;
• at least two output ports;
• a movable microstructure formed by a semiconductor process on the substrate, the movable microstructure being suspended at a distance from the substrate and being adapted to move relative to the substrate;
• an actuator to cause the movable microstructure to move from a first position to a second position relative to the substrate;
• and
• a light-guiding structure mounted to the movable microstructure such that the light-guiding structure moves with the movable microstructure, the light-guiding structure including a first optical path and a second optical path, the first optical path having a large radius of curvature which gradually changes the direction of the first optical signal, whereby when the movable microstructure is in a first position, the first optical signal travels along the first optical path in the light-guiding structure, and when the movable microstructure is in a second position, the first optical signal travels along the second optical path in the light-guiding structure.

A method of switching a first optical signal and a second optical signal from a first set of optical paths to a second set of optical paths, the method comprising the steps of:

• propagating the first and second optical signals toward a movable microstructure, the movable microstructure being formed by a semiconductor process on a substrate and being adapted to move relative to the substrate, the movable microstructure including a light guiding structure, the light guiding structure being mounted to the movable microstructure such that the light guiding structure moves with the movable microstructure;
• determining whether the first and second optical signals are to propagate along the first or second sets of optical paths;
• selectively moving the microstructure to a first position or a second position relative to the substrate, whereby when the movable microstructure is in the first position, the first and second optical signals travel along the first set of optical paths in the light guiding structure, and when the movable microstructure is in the second position, the first and second optical signals travel along the second set of optical paths in the light guiding structure;
• and
• gradually changing the direction of the first optical signal as it propagates along the first or second sets of optical paths.