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US 6,647,164 B1Granted
Gimbaled micro-mirror positionable by thermal actuators
Assignee3M Innovative Properties Company
InventorsBilly L. Weaver, Mike E. Hamerly, Robert G. Smith
Life of this patent
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Abstract
A micro-mechanical device including a gimbaled micro-mirror position able by a one or more thermal actuators. The thermal actuators are not attached to the micro-mirror. Rather, the micro-mirror is retained to the substrate by one or more gimbals. The micrometer sized thermal actuators are capable of repeatable and rapid moving the micro-mirror out-of-plane to accurately and repeatably steer a beam of light.
Claims20
A micro-mechanical device for steering beams of light comprising:
- at least one mirror constructed on a surface of the substrate;
- at least one gimbal mechanically coupling the mirror to the surface of the substrate in a neutral position;
- and
- at least one thermal actuator constructed on the surface of the substrate adjacent to the mirror, the thermal actuator having a free end positioned to engage the mirror, but not attached to the mirror.
1 more element
An optical switch comprising:
- at least one input optical fiber;
- one or more output optical fibers;
- a micro-mechanical device for directing an optical signal projecting from the input optical fiber to any of the output optical fibers, the micro-mechanical device comprising;
- at least one mirror constructed on a surface of the substrate and positioned to optically couple with the input optical fiber;
- at least one gimbal mechanically coupling the mirror to the surface of the substrate in a neutral position;
- and
- at least one thermal actuator constructed on the surface of the substrate adjacent to the mirror, the thermal actuators having a free end positioned to engage the mirror, but is not attached to the mirror.
4 more elements
Dependencies are inferred from the claim text.