Method for measuring fine pattern, apparatus for measuring fine pattern, and record medium that can store therein program to measure fine pattern and can be read by using computer

A method for measuring a fine pattern, comprising:

• a first step of capturing an image of a fine pattern;
• a second step of extracting a contour of the fine pattern from the image;
• a third step of capturing a standard figure of the fine pattern;
• a fourth step of superimposing the standard figure on the contour by enlarging or reducing the standard figure while maintaining an aspect ratio thereof in order to fit the standard figure into the contour;
• a fifth step of extracting an intersection of the contour and the standard figure;
• a sixth step of extracting a differential region surrounded by the contour, the standard figure and the intersection;
• a seventh step of comparing the number of the differential region with the number of correction pattern added to the standard figure;
• an eighth step of measuring an area of the differential region;
• a ninth step of extracting a correction pattern region from the differential region, wherein:
• if the number of the differential region is equal to the number of the correction pattern, the ninth step is a step of extracting all the differential region as the correction pattern region;
• if the number of the differential region is greater than the number of the correction pattern, and if two blocks are generated at a predetermined interval in a distribution of the area, the ninth step is a step of extracting the differential region having an area equal to or wider than a predetermined threshold as the correction pattern region;
• and
• if the number of the differential region is greater than the number of the correction pattern, and if two blocks are not generated at a predetermined interval in a distribution of the area, the ninth step comprises:
• a process for indicating the differential region in a polar coordinate;
• a process for preparing a weighting function having a weight in an existence range of the correction pattern;
• a process for multiplying the differential region indicated in the polar coordinate by the weighting function;
• and
• a process for extracting as the correction pattern region the differential region after it is multiplied by the weighting function;
• and
• an tenth step of measuring the correction pattern region.

An apparatus for measuring a fine pattern, comprising:

• a photographing device configured to obtain an image of a fine pattern;
• a memory configured to store therein a pattern data of a standard figure of the fine pattern;
• and
• an image processor comprising:
• a device configured to extract a contour of the fine pattern from the image;
• a device configured to superimpose the standard figure on the contour;
• a device configured to extract an intersection of the standard figure and the contour;
• a device configured to extract a differential region surrounded by the standard figure, the contour and the intersection;
• a device configured to extract a correction pattern region from the differential region, comprising:
• a unit configured to indicate the differential region in a polar coordinate;
• a unit configured to prepare a weighting function having a weight in an existence range of a correction pattern;
• a unit configured to multiply the differential region by the weighting function;
• and
• a unit configured to extract as the correction pattern region the differential region after it is multiplied by the weighting function;
• and
• a device configured to measure the correction pattern region.

A record medium that can be read by a computer which stores therein a program for measuring a fine pattern, the program comprising:

• a first step of capturing an image of a fine pattern;
• a second step of extracting a contour of the fine pattern from the image;
• a third step of capturing a standard figure of the fine pattern;
• a fourth step of superimposing the standard figure on the contour by enlarging or reducing the standard figure while maintaining an aspect ratio thereof in order to fit the standard figure into the contour;
• a fifth step of extracting an intersection of the contour and the standard figure;
• a sixth step of extracting a differential region surrounded by the contour, the standard figure and the intersection;
• a seventh step of extracting a correction pattern region from the differential region, comprising:
• a process for indicating the differential region in a polar coordinate;
• a process for preparing a weighting function having a weight in an existence range of a correction pattern;
• a process for multiplying the differential region by the weighting function;
• and
• a process for extracting as the correction pattern region the differential region after it is multiplied by the weighting function;
• and
• an eighth step of measuring the correction pattern region.

An apparatus for measuring a fine pattern, comprising:

• a photographing device configured to obtain an image of a fine pattern;
• a memory configured to store therein a pattern data of a standard figure of the fine pattern;
• and
• an image processor comprising:
• a device configured to extract a contour of the fine pattern from the image;
• a device configured to superimpose the standard figure on the contour;
• a device configured to extract an intersection of the standard figure and the contour;
• a device configured to extract a differential region surrounded by the standard figure, the contour and the intersection;
• a device configured to compare the number of the differential region with the number of correction pattern added to the standard figure;
• a device configured to measure an area of the differential region;
• a device configured to extract a correction pattern region from the differential region, wherein:
• if the number of the differential region is equal to the number of the correction pattern, the device extracts all the differential region as the correction pattern region;
• if the number of the differential region is greater than the number of the correction pattern, and if two blocks are generated at a predetermined interval in a distribution of the area, the device extracts the differential region having an area equal to or wider than a predetermined threshold as the correction pattern region;
• and
• if the number of the differential region is greater than the number of the correction pattern, and if two blocks are not generated at a predetermined interval in a distribution of the area, the device comprises:
• a unit configured to indicate the differential region in a polar coordinate;
• a unit configured to prepare a weighting function having a weight in an existence range of the correction pattern;
• a unit configured to multiply the differential region indicated in the polar coordinate by the weighting function;
• and
• a unit configured to extract as the correction pattern region the differential region after it is multiplied by the weighting function;
• and
• a device configured to measure the correction pattern region.

A record medium that can be read by a computer which stores therein a program for measuring a fine pattern, the program comprising:

• a first step of capturing an image of a fine pattern;
• a second step of extracting a contour of the fine pattern from the image;
• a third step of capturing a standard figure of the fine pattern;
• a fourth step of superimposing the standard figure on the contour by enlarging or reducing the standard figure while maintaining an aspect ratio thereof in order to fit the standard figure into the contour;
• a fifth step of extracting an intersection of the contour and the standard figure;
• a sixth step of extracting a differential region surrounded by the contour, the standard figure and the intersection;
• a seventh step of comparing the number of the differential region with the number of correction pattern added to the standard figure;
• an eighth step of measuring an area of the differential region;
• a ninth step of extracting a correction pattern region from the differential region, wherein:
• if the number of the differential region is equal to the number of the correction pattern, the ninth step is a step of extracting all the differential region as the correction pattern region;
• if the number of the differential region is greater than the number of the correction pattern, and if two blocks are generated at a predetermined interval in a distribution of the area, the ninth step is a step of extracting the differential region having an area equal to or wider than a predetermined threshold as the correction pattern region;
• and
• if the number of the differential region is greater than the number of the correction pattern, and if two blocks are not generated at a predetermined interval in a distribution of the area, the ninth step comprises:
• a process for indicating the differential region in a polar coordinate;
• a process for preparing a weighting function having a weight in an existence range of the correction pattern;
• a process for multiplying the differential region indicated in the polar coordinate by the weighting function;
• and
• a process for extracting as the correction pattern region the differential region after it is multiplied by the weighting function;
• and
• a tenth step of measuring the correction pattern region.