Semiconductor light-emitting device with an improved ridge waveguide structure and method of forming the same

A ridge waveguide structure of a cladding layer in a semiconductor light emitting device, said ridge waveguide structure extending directly over a stripe-shaped selective region of an upper surface of an etching stopper layer, and said ridge waveguide structure comprising:

• at least a current injection region;
• and
• current non-injection regions adjacent to facets and separating said current injection region from said facets,
• wherein the current non-injection regions are smaller in height than said at least current injection region, and
• wherein said at least current injection region and said current non-injection regions are uniform in width from a bottom level to a top level of said ridge waveguide structure, so that side walls of said ridge waveguide structure are continuous and smooth at boundaries between said at least current injection region and said current non-injection side regions.

A semiconductor light-emitting device comprising:

• a substrate;
• a first multi-layered structure of a first conductivity type overlying said substrate;
• an active region overlying said first multi-layered structure;
• a second multi-layered structure of a second conductivity type overlying said active region;
• and
• at least a ridge waveguide structure of said second conductivity type overlying at least a stripe-shaped selective region of an upper surface of said second multi-layered structure, said at least ridge waveguide structure further comprising:
• at least a current injection region;
• and current non-injection regions adjacent to facets and separating said current injection region from said facets,
• wherein the current non-injection regions are smaller in height than said at least current injection region, and
• wherein said at least current injection region and said current non-injection regions have a uniform width at least at a lower level than an intermediate level of said ridge waveguide structure.

A method of forming a ridge waveguide structure, said method comprising the steps of:

• forming a first etching mask on a first selected region of an upper surface of a cap layer overlying at least a cladding layer, said first selected region being separated by side regions adjacent to opposite edges distanced in a cavity length direction;
• selectively removing said cap layer by using said first etching mask, so that said cap layer remains only on said first selected region, and an upper surface of said at least cladding layer is partially exposed on said side regions adjacent to said opposite edges;
• forming a second etching mask overlying a stripe-shaped longitudinal center region extending through said remaining cap layer and said at least cladding layer, so that said upper surfaces of said remaining cap layer and said at least cladding layer are partially exposed on other side regions adjacent to other opposite edges distanced in a lateral direction perpendicular to said cavity length direction;
• selectively removing said remaining cap layer by using said second etching mask, so that said cap layer remains only on a first overlapping region of said first selected region and said stripe-shaped longitudinal center region;
• selectively removing said at least cladding layer only on said other side regions by using said second etching mask, so that said at least cladding layer becomes comprising a mesa structure portion on said stripe-shaped longitudinal center region and flat thickness-reduced portions on said other side regions, said mesa structure portion having a first height higher than a second height of said flat thickness-reduced portions;
• forming a third etching mask overlying on said first overlapping regions, so that an upper surface of said mesa structure portion is exposed, except under said cap layer on said first overlapping region;
• and
• selectively removing said at least cladding layer by using said third etching mask, so that said at least cladding layer remains only on said stripe-shaped longitudinal center region, and said mesa structure portion is selectively reduced in thickness except under said cap layer,
• whereby said remaining cladding layer comprises a mesa structure having a uniform bottom width, and said mesa structure comprising a current injection region having said first height and current non-injection regions having a third height lower than said first height.

A method of forming a ridge waveguide structure, said method comprising the steps of:

• forming a first etching mask on a stripe-shaped longitudinal center region of an upper surface of a cap layer overlying at least a cladding layer, said stripe-shaped longitudinal center region extending between first opposite edges distanced from each other in a cavity length direction, and said stripe-shaped longitudinal center region being separated by side regions adjacent to second opposite edges, which are parallel to a cavity length direction and which are distanced from each other in a lateral direction perpendicular to said cavity length direction;
• selectively removing said cap layer and said at least cladding layer by using said first etching mask, so that said cap layer remains only on said stripe-shaped longitudinal center region, and a thickness of said at least cladding layer on said side regions is reduced, whereby said at least cladding layer becomes comprising a mesa structure portion on said stripe-shaped longitudinal center region and flat thickness-reduced portions on said side regions, said mesa structure portion having a first height higher than a second height of said flat thickness-reduced portions;
• forming a second etching mask overlying a first overlapping region of said stripe-shaped longitudinal center region and a first selected region being separated by other side regions adjacent to said first opposite edges distanced in said cavity length direction;
• selectively removing said remaining cap layer by using said second etching mask, so that said cap layer remains only on said first overlapping region;
• and
• selectively removing said at least cladding layer by using said second etching mask, so that said at least cladding layer remains only on said stripe-shaped longitudinal center region, and said mesa structure portion is selectively reduced in thickness except under said cap layer,
• whereby said remaining cladding layer comprises a mesa structure having a uniform bottom width, and said mesa structure comprising a current injection region having said first height and current non-injection regions having a third height lower than said first height.

A method of forming a ridge waveguide structure, said method comprising the steps of:

• forming a first etching mask on a stripe-shaped longitudinal center region of an upper surface of a cap layer overlying at least a cladding layer, said stripe-shaped longitudinal center region extending between first opposite edges distanced from each other in a cavity length direction, and said stripe-shaped longitudinal center region being separated by side regions adjacent to second opposite edges, which are parallel to a cavity length direction and which are distanced from each other in a lateral direction perpendicular to said cavity length direction;
• selectively removing said cap layer by using said first etching mask, so that said cap layer remains only on said stripe-shaped longitudinal center region;
• forming a second etching mask overlying a first overlapping region of said stripe-shaped longitudinal center region and a first selected region being separated by other side regions adjacent to said first opposite edges distanced in said cavity length direction;
• selectively removing said remaining cap layer and said at least cladding layer by using said second etching mask, so that said cap layer remains only on said first overlapping region, and a thickness of said at least cladding layer on said side regions is reduced, whereby said at least cladding layer becomes comprising a mesa structure portion on said stripe-shaped longitudinal center region and flat thickness-reduced portions on said side regions, said mesa structure portion having a first height higher than a second height of said flat thickness-reduced portions;
• further selectively removing said at least cladding layer by using said second etching mask, so that said at least cladding layer remains only on said stripe-shaped longitudinal center region, and said mesa structure portion is selectively reduced in thickness except under said cap layer,
• whereby said remaining cladding layer comprises a mesa structure having a uniform bottom width, and said mesa structure comprising a current injection region having said first height and current non-injection regions having a third height lower than said first height.