Capacitor and method for fabricating the same
AssigneeFujitsu Limited
InventorsToshiharu Takaramoto, Kunihiko Gotoh
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Abstract
The capacitor comprises a lower layer electrode 22 formed on a substrate 10 with an inter-layer insulation film 12 therebetween; an upper layer electrode 24 opposed to the lower layer electrode 22 with an inter-layer insulation film 12 therebetween, a lower interconnection layer 14 formed between the substrate 10 and the lower layer electrode 22, and electrically connected to the upper layer electrode 24, whereby the parasitic capacitance, which is a cause for lower capacitor accuracy, useless power consumption, etc. can be drastically decreased, and external noises can be shielded off.
Claims8
A capacitor comprising:
- a lower layer electrode formed above a substrate with a first insulation film therebetween;
- an upper layer electrode opposed to the lower layer electrode with a second insulation film therebetween;
- and
- a conductive lower interconnection layer formed between the substrate and the lower layer electrode and electrically connected to the upper layer electrode.
A capacitor comprising:
- a lower layer electrode formed above a substrate with a first insulation film therebetween;
- an upper layer electrode opposed to the lower layer electrode with a second insulation film therebetween;
- a conductive lower interconnection layer formed between the substrate and the lower layer electrode and electrically connected to the upper layer electrode;
- and
- an conductive upper interconnection layer formed above the upper layer electrode with a third insulation film therebetween and electrically connected to the conductive lower interconnection layer.
Dependencies are inferred from the claim text.