Strain-isolated stage mirror
AssigneeZygo Corporation
InventorsPeter B. Mumola, Flemming Tinker, Steven R. Patterson
Life of this patent
Estimating the term…
Abstract
A strain-isolated mirror is made from a substrate having first and second body portions. First and second connecting portions extend across a gap between the first body portion and the second body portion. A first flexural hinge on the first second connecting portion couples the second connecting portion to the first body portion.
Claims23
A strain-isolated mirror comprising a substrate having integrated therein:
- a first body portion;
- a second body portion;
- a first connecting portion extending across a gap between said first body portion and said second body portion;
- a second connecting portion extending between said first body portion and said second body portion, said second connecting portion having
- a central portion having a first thickness and a first end portion adjacent to said first body portion, said first end portion having a second thickness smaller than said first thickness, and
- a second end portion adjacent to said second body portion, said second end portion having a third thickness smaller than said first thickness;
- and
- a first flexural hinge for coupling said first body portion to said second connecting portion.
A strain-isolated mirror comprising a substrate having integrated therein:
- a first body portion:
- a second body portion:
- a first connecting portion extending across a gap between said first body portion and said second body portion, said first connecting portion including
- a first end portion having a first thickness and being adjacent to said first body portion,
- a second end portion having a second thickness and being adjacent to said second body portion, and
- a central portion between said first and second end portions, said central portion having a third thickness that is smaller than said first thickness and smaller than said second thickness;
- and
- a second connecting portion extending between said first body portion and said second body portion, said second connecting portion having
- a first flexural hinge for coupling said first body portion to said second connecting portion.
A strain-isolated mirror comprising a substrate made of a material selected from the group consisting of:
- glass, metal, glass-ceramic matrix, low-expansion glass ceramic matrix, and ceramic, said substrate having integrated therein:
- a first body portion;
- a second body portion;
- a first connecting portion extending across a gap between said first body portion and said second body portion;
- and
- a second connecting portion extending between said first body portion and said second body portion, said second connecting portion having
- a first flexural hinge for coupling said first body portion to said second connecting portion.
A semiconductor processing system having
- a stage having a first edge, said stage being translatable along a first direction;
- and
- a first strain-isolated stage mirror coupled to said first edge, said first strain-isolated stage mirror having a first body portion, a second body portion, a first connecting portion extending across a gap between said first body portion and said second body portion;
- and a second connecting portion extending between said first body portion and said second body portion, said second connecting portion having a first flexural hinge for coupling said first body portion to said second connecting portion.
Dependencies are inferred from the claim text.