Support assembly for an exposure apparatus

A support assembly that is adapted for supporting a stage assembly, the stage assembly including at least a first component and a second component, the support assembly comprising:

• an outer frame being adapted to support the first component of the stage assembly, the outer frame including an outer tube;
• and
• an inner frame being adapted to support the second component of the stage assembly, the inner frame being positioned within a portion of the outer frame, the inner frame including an inner tube that is positioned within the outer tube.

A support assembly that is adapted for supporting a stage assembly, the stage assembly including at least a first component and a second component, the support assembly comprising:

• an outer frame being adapted to support the first component of the stage assembly, the outer frame including a first side outer tube, a second side outer tube, and a third side outer tube;
• and
• an inner frame being adapted to support the second component of the stage assembly, the inner frame being positioned within a portion of the outer frame, the inner frame including a first side inner tube, a second side inner tube, and a third side inner tube.

A support assembly that is adapted for supporting a stage assembly, the stage assembly including at least a first component and a second component, the support assembly comprising:

• an outer frame being adapted to support the first component of the stage assembly, the outer frame including an outer base having a base outer tube;
• and
• an inner frame being adapted to support the second component of the stage assembly, the inner frame being positioned within a portion of the outer frame, the inner frame including an inner base that is positioned within the outer base, the inner base including a base inner tube that is positioned within the base outer tube.

A support assembly that is adapted for supporting a stage assembly, the stage assembly including at least a first component and a second component, the support assembly comprising:

• an outer frame being adapted to support the first component of the stage assembly, the outer frame including an outer base having a first base outer tube, a second base outer tube and a third base outer tube;
• and
• an inner frame being adapted to support the second component of the stage assembly, the inner frame being positioned within a portion of the outer frame, the inner frame including an inner base that is positioned within the outer base, the inner base includes a first base inner tube, a second base inner tube and a third base inner tube.

A support assembly that is adapted for supporting a stage assembly, the stage assembly including at least a first component and a second component, the support assembly comprising:

• an outer frame being adapted to support the first component of the stage assembly, the outer frame including an outer tube, an outer constraining tube, and an outer dampener, the outer constraining tube being positioned within the outer tube and the outer dampener being positioned between the outer tube and the outer constraining tube;
• and
• an inner frame being adapted to support the second component of the stage assembly, the inner frame being positioned within a portion of the outer frame.

A support assembly that is adapted for supporting a stage assembly, the stage assembly including at least a first component and a second component, the support assembly comprising:

• an outer frame being adapted to support the first component of the stage assembly;
• and
• an inner frame being adapted to support the second component of the stage assembly, the inner frame being positioned within a portion of the outer frame, the inner frame including an inner tube, an inner constraining tube, and an inner dampener, the inner constraining tube being positioned within the inner tube and the inner dampener being positioned between the inner tube and the inner constraining tube.

A method for making a support assembly for supporting a stage assembly, the stage assembly including a first component and a second component, the method comprising the steps of:

• providing an outer frame to support the first component, the outer frame including an outer tube;
• and
• providing an inner frame to support the second component, the inner frame being positioned within a portion of the outer frame, the inner frame including an inner tube that is positioned within the outer tube.

A method for making a support assembly for supporting a stage assembly, the stage assembly including a first component and a second component, the method comprising the steps of:

• providing an outer frame to support the first component, the outer frame including an outer tube, an outer constraining tube and an outer dampener, the outer constraining tube being positioned within the outer tube, and the outer dampener being positioned between the outer tube and the outer constraining tube;
• and
• providing an inner frame to support the second component, the inner frame being positioned within a portion of the outer frame.

A method for making a support assembly for supporting a stage assembly, the stage assembly including a first component and a second component, the method comprising the steps of:

• providing an outer frame to support the first component;
• and
• providing an inner frame to support the second component, the inner frame being positioned within a portion of the outer frame, the inner frame including an inner tube, an inner constraining tube and an inner dampener, the inner constraining tube being positioned within the inner tube, and the inner dampener being positioned between the inner tube and the inner constraining tube.

An apparatus comprising:

• a stage assembly including a stage base, a stage, and a mover that moves the stage relative to the stage base the mover including a reaction component;
• and
• a support assembly that supports the stage assembly, the support assembly including an outer frame that supports the stage base and an inner frame that supports the reaction component without supporting the stage base, the inner frame being positioned within a portion of the outer frame.

A support assembly that supports a stage assembly, the stage assembly including at least a first component and a second component, the support assembly comprising:

• an outer frame that supports the first component of the stage assembly, the outer frame including an outer tube;
• and
• an inner frame that supports the second component of the stage assembly, the inner frame including an inner that is positioned within the outer tube.

An apparatus that is coupled to a mounting base, the apparatus comprising:

• a stage assembly including at least a first component and a second component;
• and
• a support assembly including a first frame that supports the first component and a second frame that support the second component, the first frame including a first side unit and the second frame including a first side unit, wherein the first side unit of the first frame is disposed to surround at least a portion of the first side unit of the second frame.

An apparatus comprising:

• a stage assembly including a stage base, a stage, and a mover that moves the stage relative to the stage base the mover including a reaction component;
• and
• a support assembly that supports the stage assembly, the support assembly including an outer frame that supports the stage base, the outer frame including an outer, tube and an inner frame that supports the reaction component, the inner frame including an inner tube that is positioned within the outer tube.