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US 6,646,704 B2Granted
Apparatus for projection utilizing liquid crystal light modulator and method of manufacturing said liquid crystal light modulator
AssigneeKoninklijke Philips Electronics N.V.
InventorGerhard Liebscher
Life of this patent
Estimating the term…
Abstract
A liquid crystal light modulator projection apparatus and method of manufacturing the liquid crystal light modulator comprising a semiconducting substrate (1) with transistors (2) and control circuits, a light-reflecting layer (4), and a liquid crystal unit (7) which is embedded between a front plate (9) with a transparent covering electrode (8) and at least two pixel electrode (6), wherein each electrode (6) is connected to a transistor (2) via a contact hole (10) that traverses the light-reflecting layer (4), which itself comprises a thin insulating wall coating that facilitates the electrical insulation of the electrically conducting material inside the contact hole (10) from the light-reflecting layer (4).
Claims7
A projection device fitted with a liquid crystal light modulator which comprises,
- a semiconducting substrate (1) on which transistor arrays and control circuits are provided,
- a first insulating layer (3) provided physically upon the substrate (1),
- a light-reflecting layer (4) provided physically upon the first insulating layer (3) opposite the substrate (1),
- a second insulating layer (5) provided physically upon the light-reflecting layer (4) opposite the first insulating layer (3),
- at least two pixel electrodes (6) provided physically upon the second insulating layer (5) opposite the light-reflecting layer (4), wherein each pixel electrode (6) is physically connected to a transistor (2) through a contact hole (10) which is filled with an electrically conducting material, and wherein the wall of the contact hole (10) is fully covered with a third insulating layer (11) such that the contact hole (10) is insulated from physically contacting the first insulating layer (3), the light-reflecting layer (4) or the second insulating layer (5),
- a liquid crystal unit (7) provided physically upon both the second insulating layer (5) opposite the light-reflecting layer (4) and each pixel electrode (6) opposite the second insulating layer (5),
- a cover electrode (8) provided physically upon the liquid crystal unit (7) opposite the second insulating layer (5) and each pixel electrode (6),
- and a front plate (9) provided physically upon the cover electrode (8) opposite the liquid crystal unit (7).
5 more elements
A liquid crystal modulator which comprises,
- a semiconducting substrate (1) on which transistor arrays and control circuits are provided,
- a first insulating layer (3) provided physically upon the substrate (1),
- a light-reflecting layer (4) provided physically upon the first insulating layer (3) opposite the substrate (1),
- a second insulating layer (5) provided physically upon the light-reflecting layer (4) opposite the first insulating layer (3),
- at least two pixel electrodes (6) provided physically upon the second insulating layer (5) opposite the light-reflecting layer (4), wherein each pixel electrode (6) is physically connected to a transistor (2) through a contact hole (10) which is filled with an electrically conducting material, and wherein the wall of the contact hole (10) is fully covered with a third insulating layer (11) such that the contact hole (10) is insulated from physically contacting the first insulating layer (3), the light-reflecting layer (4) or the second insulating layer (5),
- a liquid crystal unit (7) provided physically upon both the second insulating layer (5) opposite the light-reflecting layer (4) and each pixel electrode (6) opposite the second insulating layer (5),
- a cover electrode (8) provided physically upon the liquid crystal unit (7) opposite the second insulating layer (5) and each pixel electrode (6),
- and a front plate (9) provided physically upon the cover electrode (8) opposite the liquid crystal unit (7).
5 more elements
A method of manufacturing a liquid crystal modulator which comprises,
- depositing a semiconducting substrate (1) with transistor arrays and control circuits thereon,
- depositing a first insulaling layer (3) physically upon the substrate (1),
- depositing a light-reflecting layer (4) physically upon the first insulating layer (3) opposite the substrate (1),
- depositing a second insulating layer (5) physically upon the light-reflecting layer (4) opposite the first insulating layer (3),
- providing at least two pixel electrodes (6) physically upon the second insulating layer (5) opposite the light-reflecting layer (4), wherein each pixel electrode (6) is physically connected to a transistor (2) through a contact hole (10) which is filled with an electrically conducting material, and fully covering the wall of the contact hole (10) with a third insulating layer (11) such that the contact hole (10) is insulated from physically contacting the first insulating layer (3), the light-reflecting layer (4) or the second insulating layer (5),
- depositing a liquid crystal unit (7) physically upon both the second insulating layer (5) opposite the light-reflecting layer (4) and each pixel electrode (6) opposite the second insulating layer (5),
- depositing a cover electrode (8) physically upon the liquid crystal unit (7) opposite the second insulating layer (5) and each pixel electrode (6),
- and depositing a front plate (9) physically upon the cover electrode (8) opposite the liquid crystal unit (7).
5 more elements
Dependencies are inferred from the claim text.