Patterning method, patterning apparatus, patterning template, and method for manufacturing the patterning template
AssigneeSeiko Epson Corporation
InventorsSatoshi Nebashi, Takao Nishikawa, Tatsuya Shimoda
Life of this patent
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Abstract
A template 1 is brought close to or in contact with a surface to be patterned 111 and patterns are formed with liquid 62 on the surface 111. This method comprises the steps of: bringing the template 1 close to or essentially in contact with the surface 111, supplying liquid 62 to a plurality of through holes 12 established in the pattern transfer region 10 of the template 1 for supplying the liquid 62, and separating the template 1 from the surface 111 after the liquid 62 is adhered to the surface 111 via the through holes 12.
Claims9
A patterning template for applying liquid to a surface to be patterned and forming patterns, comprising:
- a plurality of pattern transfer regions of said template that have a concave shape;
- a non-pattern transfer region;
- and
- a plurality of through holes disposed in the pattern transfer regions of said template that pass through a back surface of said template,
- wherein each of the plurality of pattern transfer regions of said template has a volume which suffices for an amount of liquid necessary for patterning and for reduction due to an evaporation of the liquid.
A patterning template for applying liquid to a surface to be patterned and forming patterns, comprising:
- a plurality of pattern transfer regions of said template that have a convex shape;
- a non-pattern transfer region;
- and
- a plurality of through holes disposed in the pattern transfer regions of said template that pass through a back surface of said template,
- wherein each of the plurality of pattern transfer regions of said template has a volume which suffices for an amount of liquid necessary for patterning and for reduction due to an evaporation of the liquid.
A patterning template for applying liquid to a surface to be patterned, evaporating a solvent component of said applied liquid, and for forming patterns, comprising:
- a plurality of pattern transfer regions of said template that have a concave shape;
- a non-pattern transfer region;
- and
- a plurality of through holes disposed in the pattern transfer regions of said template that pass through a back surface of said template,
- wherein each of the plurality of pattern transfer regions of said template has a volume which suffices for an amount of liquid necessary for patterning and for reduction due to an evaporation of the solvent component.
A patterning template for applying liquid to a surface to be patterned, evaporating a solvent component of said applied liquid, and for forming patterns, comprising:
- a plurality of pattern transfer regions of said template that have a convex shape;
- a non-pattern transfer region;
- and
- a plurality of through holes disposed in the pattern transfer regions of said template that pass through a back surface of said template,
- wherein each of the plurality of pattern transfer regions of said template has a volume which suffices for an amount of liquid necessary for patterning and for reduction due to an evaporation of the solvent component.
Dependencies are inferred from the claim text.