Method and apparatus for testing semiconductor devices using improved testing sequence

An apparatus for testing semiconductor devices comprising:

• a drive part that carries a wafer including a plurality of semiconductor devices each having a main circuit part, a test function part for testing the main circuit part, and a switching circuit part for switching a signal path either to the main circuit part or to the test function part upon receipt of an external signal from outside of the semiconductor devices, said drive part further moving the semiconductor device of the wafer to a suitable position;
• a signal transmission part that transmits external signals and test signals to suitable semiconductor devices on the wafer carried by said drive part;
• and
• a central processing part configured to perform the following steps:
• (a) sending a first test signal to the test function part of a semiconductor device through the switching circuit part of the device,
• (b) responsive to the first test signal, subjecting the test function part to a self-diagnosis and testing the main circuit part using the test function part,
• (c) judging the semiconductor device to be faulty if either the self-diagnostic of the test function part or the test on the main circuit part by the test function part has produced an abnormal result,
• (d) supplying the main circuit part of any semiconductor device judged faulty in step
• (c) with a second test signal through the switching circuit part,
• (e) judging the main circuit part of the device judged faulty in step (c) based on testing the main circuit part thereof using the second test signal, and
• (f) judging the semiconductor device judged faulty in step (c) to be normal if the main circuit part is judged to be normal in step (e).

A method for testing a semiconductor device disposed on a wafer, the semiconductor device including a main circuit part and a test function part configured for testing the main circuit part, the method comprising the machine-implemented steps of:

• sending a first signal to the test function part of the semiconductor device to initiate a diagnostic test on the test function part;
• responsive to an abnormal result of the diagnostic test, sending a second signal to initiate a test on the main circuit part;
• and
• determining a test status of the semiconductor device based on a result of the test on the main circuit part.

A semiconductor device testing apparatus for testing a semiconductor device disposed on a wafer, the semiconductor device including a main circuit part and a test function part configured for testing the main circuit part, the semiconductor device testing apparatus comprising:

• a drive part configured to carry the wafer and move the semiconductor device on the wafer to a suitable position for testing;
• a signal transmission part for transmitting signals to the semiconductor device on the wafer;
• and
• a central processing element configured to carry out the machine-machine implemented steps of:
• sending a first signal to initiate a diagnostic test on the test function part;
• responsive to an abnormal result of the diagnostic test, sending a second signal to initiate a test on the main circuit part;
• and
• determining a test status of the semiconductor device based on a result of the test on the main circuit part.