Method for measuring the thickness of multi-layer films
AssigneePlast-Control Gerätebau GmbH
InventorsFrank Müller, Stefan Konermann, Norbert Sappelt
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Abstract
A method for capacitively measuring the thickness of multi-layer films (10), the layers (32, 34) the dielectric constants of which differ at least at a particular temperature, wherein, in addition to the capacitive measurement, at least one further thickness measurement is carried out under different conditions, and wherein the thicknesses (d1, d2) of the individual layers is determined by comparing the measurement results and by means of the different dielectric constants.
Claims20
A method for capacitively measuring thickness of multi-layer films comprised of individual layers having dielectric constants which differ at least at a particular temperature, comprising the steps of:
- taking a capacitive measurement of a multi-layer film to obtain a first thickness measurement,
- carrying out at least one further thickness measurement under different conditions than conditions used for said capacitive measurement, and
- determining the thicknesses of the individual layers by comparing measurement results from said steps of taking and carrying out and by means of the different dielectric constants.
Dependencies are inferred from the claim text.