Semiconductor device
AssigneeHitachi, Ltd.
InventorsNaotaka Tanaka, Hideo Miura, Yoshiyuki Kado, Ikuo Yoshida, Takahiro Naito
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AssigneeHitachi, Ltd.
InventorsNaotaka Tanaka, Hideo Miura, Yoshiyuki Kado, Ikuo Yoshida, Takahiro Naito
Estimating the term…
In order to realize a semiconductor device and a manufacturing method thereof which can keep with a high reliability an electric connection between each of bump pads formed on LSI chips and each of electrode pads formed on an interconnection substrate, within an guaranteed temperature range, a thermal expansion coefficient of an adhesive (3) is in the range of 20 to 60 ppm, and an elastic modulus of a build-up portion (6) is in the range of 5 to 10 GPa. Further, the build-up portion (6) is constituted by a multi-layer build-up substrate in which buid-up portion a peak value (a glass transition temperature) of a loss coefficient exists within a range of 100° C. to 250° C. and does not exist within a range of 0° C. to 100° C. By setting or selecting the physical properties in the manner disclosed above, it is possible to realize a semiconductor device and a manufacturing method thereof which can keep with a high reliability an electric bonding between the bump pads (2) formed on the LSI chips (1) and the electrode pads (4) on the interconnection substrate (5) within an guaranteed temperature range.
A semiconductor device comprising
A semiconductor device comprising
A semiconductor device comprising
A semiconductor device comprising
Dependencies are inferred from the claim text.