Semiconductor power device and method of formation
AssigneeMotorola, Inc.
InventorsLei L. Mercado, Vijay Sarihan, Young Sir Chung, James Jen-Ho Wang, Edward R. Prack
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AssigneeMotorola, Inc.
InventorsLei L. Mercado, Vijay Sarihan, Young Sir Chung, James Jen-Ho Wang, Edward R. Prack
Estimating the term…
In accordance with one embodiment, a stress buffer (40) is formed between a power metal structure (90) and passivation layer (30). The stress buffer (40) reduces the effects of stress imparted upon the passivation layer (30) by the power metal structure (90). In accordance with an alternative embodiment, a power metal structure (130A) is partitioned into segments (1091), whereby electrical continuity is maintained between the segments (1090) by remaining portions of a seed layer (1052) and adhesion/barrier layer (1050). The individual segments (1090) impart a lower peak stress than a comparably sized continuous power metal structure (9).
A method for forming a semiconductor device comprising:
A method for forming a semiconductor device comprising:
Dependencies are inferred from the claim text.