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US 6,646,314 B2Granted
Method for producing a micromechanical structure and a micromechanical structure
AssigneeRobert Bosch GmbH
InventorJoachim Rudhard
Life of this patent
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Abstract
A method for producing a micromechanical structure, and a micromechanical structure having a movable structure and a stationary structure made of silicon. In the method for producing the micromechanical structure, in one process step, a superficial metal-silicide layer is produced in the movable structure and/or the stationary structure.
Claims5
A micromechanical structure comprising:
- at least one stationary structure;
- and
- a movable structure movable relative to the stationary structure, the movable structure including a vertical side wall,
- wherein the movable structure and the stationary structure are composed substantially of silicon, and
- wherein a superficial metal-silicide layer is arranged on the vertical side wall.
2 more elements
Dependencies are inferred from the claim text.