Method of X-ray analysis in a particle-optical apparatus

Abstract

Samples such as semiconductor wafers may be subjected to an elementary analysis by irradiation by means of electrons and measurement of the X-rays 30 generated in the sample. In order to achieve a high spatial resolution, two adjacent holes 6, 8 are formed in the sample surface, leaving a very thin separating wall 10 between said holes and hence limiting the dimension of the interaction volume 24. However, electrons pass through the wall, thus generating disturbing X-rays in the walls of the hole 8 behind the wall. According to the invention the hole 8 behind the separating wall 10 is provided with a stopping material 12 of an elementary composition which deviates from that of the wall 10. If the wall to be analyzed contains silicon, the stopping material 12 should preferably be platinum or carbon.

Dependencies are inferred from the claim text.