Pulsed laser deposition of transparent conducting thin films on flexible substrates
AssigneeThe United States of America as represented by the Secretary of the Navy
InventorsHeungsoo Kim, James S. Horwitz, Zakya H. Kafafi, Alberto Pique, Gary P. Kushto
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Abstract
The invention relates to the deposition of transparent conducting thin films, such as transparent conducting oxides (TCO) such as tin doped indium oxide (ITO) and aluminum doped zinc oxide (AZO) on flexible substrates by pulsed laser deposition. The coated substrates are used to construct low cost, lightweight, flexible displays based on organic light emitting diodes (OLEDs).
Claims25
A method for depositing a transparent conducting film on a flexible substrate comprising the steps of:
- providing a flexible substrate;
- providing a target comprised of tin doped indium oxide;
- and
- exposing said target to a source of laser energy to lift said tin doped indium oxide from the surface of the target, the target and the substrate being oriented with respect to each other such that the lifted tin doped indium oxide is deposited as a film upon said flexible substrate.
A method for depositing a transparent conducting film on a flexible substrate comprising the steps of:
- providing a flexible substrate;
- providing a target comprised of aluminum doped zinc oxide;
- and
- exposing said target to a source of laser energy to lift said aluminum doped zinc oxide from the surface of the target, the target and the substrate being oriented with respect to each other such that the lifted aluminum doped zinc oxide is deposited as a film upon said flexible substrate.
A method for depositing a transparent conducting film on a flexible substrate comprising the steps of:
- providing a flexible substrate comprised of metal foil;
- providing a target made of a transparent conducting material;
- and
- exposing said target to a source of laser energy to lift the transparent conducting material from the surface of the target, the target and the substrate being oriented with respect to each other such that the lifted transparent conducting material is deposited as a film upon said flexible substrate.
Dependencies are inferred from the claim text.