Exposure method and exposure apparatus

Abstract

Prior to an exposure process in which a pattern formed on a mask is transferred by exposure onto photo-sensitized substrates, the temperature of the mask and/or the temperature of the photosensitized substrate is/are adjusted to an equilibrium temperatures which would be established during an exposure process, so that any inconvenience may be avoided, which may otherwise arise due to temperature changes with time in the environment of the exposure apparatus. Further, in a waiting interval during which no control sequence for exposure of a substrate is performed, a substrate stage for carrying a substrate is caused to wait at a position in the exposure apparatus at which stability against heat is obtained, so that any adverse effects may be minimized, which could occur due to changes in the temperature gradients prevailing in the exposure apparatus.

Dependencies are inferred from the claim text.