Photoresist compositions
AssigneeShipley Company, L.L.C.
InventorsJames W. Thackeray, James F. Cameron, Roger F. Sinta
Life of this patent
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Abstract
The invention provides photoresist compositions comprising a resin binder having acid labile blocking groups requiring an activation energy in excess of 20 Kcal/mol. for deblocking, a photoacid generator capable of generating a halogenated sulfonic acid upon photolysis and optionally, a base additive. It has found that linewidth variation is substantially reduced when using the halogenated sulfonic aced generator in a process involving a high temperature post exposure bake.
Claims17
A positive working photoresist composition comprising an alkali soluble resin substituted with an acid labile blocking group that requires an activation energy of at least 20 Kcal/mol for deblocking, and a photoacid generating compound that undergoes photolysis when exposed to a pattern of activating radition at a wavelength of 350 nm or less to yield a sulfonic acid having a strong electron withdrawing group and a pKa that does not exceed 0, the photoacid generating compound has a formula:
- where R is an organic radical having from 1 to 18 carbon atoms, X is a strong electron withdrawing group, a is a whole number from 1 to 18, R7 is a straight chain branched or cyclic alkyl group having from 1 to 10 carbon atoms and Z is a sulfonyl or a carbonyl group, the alkali soluble resin binder conforms to the formula:
- where x is from about 10 to 90 percent, y is from about 1 to 75 percent, and z is from 1 to 75 percent of the mole fraction, the hydroxyl group on the hydroxystyrene may be present at either the ortho, meta, or para positions throughout the copolymer, R11 is substituted or unsubstituted alkyl having 1 to 10 carbon atoms, R1 and R2 are independently halogen, substituted or unsubstituted alkyl having from 1 to 8 carbon atoms, substituted or unsubstituted alkoxy having from 1 to 8 carbon atoms, substituted or unsubstituted alkenyl having 2 to 8 carbon atoms, substituted or unsubstituted alkythio having from 1 to 8 carbon atoms, cyano, and nitro;
- and m is an integer of from 0 to 5 and p is an integer of from 0 to 4;
- and R3, R4, and R5 are hydrogen.
A positive working photoresist composition comprising an alkali soluble resin substituted with an acid labile blocking group that requires an activation energy of at least 20 Kcal/mol for deblocking, and a photoacid generating compound that undergoes photolysis when exposed to a pattern of activating radition at a wavelength of 350 nm or less to yield a sulfonic acid having a strong electron withdrawing group and a pKa that does not exceed 0, the sulfonic acid is selected from the group consisting of perfluorooctane sulfonic acid and 2-trifluoromethylbenzene sulfonic acid, the alkali soluble resin binder conforms to the formula:
- where x is from about 10 to 90 percent, y is from about 1 to 75 percent, and z is from 1 to 75 percent of the mole fraction, the hydroxyl group on the hydroxystyrene may be present at either the ortho, meta, or para positions throughout the copolymer, R11 is substituted or unsubstituted alkyl having 1 to 10 carbon atoms, R1 and R2 are independently halogen, substituted or unsubstituted alkyl having from 1 to 8 carbon atoms, substituted or unsubstituted alkoxy having from 1 to 8 carbon atoms, substituted or unsubstituted alkenyl having 2 to 8 carbon atoms, substituted or unsubstituted alkythio having from 1 to 8 carbon atoms, cyano, and nitro;
- and m is an integer of from 0 to 5 and p is an integer of from 0 to 4;
- and R3, R4, and R5 are hydrogen.
Dependencies are inferred from the claim text.