Resist composition
AssigneeSumitomo Chemical Company, Limited
InventorsKazuhiko Hashimoto, Yoshiko Miya
Life of this patent
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Abstract
A resist composition comprising a binder resin and a radiation-sensitive compound. The binder resin is an alkali-soluble resin or becomes alkali-soluble resin by the action of the radiation-sensitive compound after irradiation, and has a polymerization unit represented by the following formula (I): wherein, R1 represents a fluoroalkyl group having 1 to 12 carbon atoms and having at least one fluorine atom, and R2 represents hydrogen atom or an acyl group having 2 to 5 carbon atoms.
Claims2
A resist composition, comprising a binder resin and a radiation-sensitive compound, wherein said binder resin is an alkali-soluble resin or becomes an alkali-soluble resin by the action of said radiation-sensitive compound after irradiation, and comprises a polymerization unit represented by the following formula (I):
- wherein, R1 represents a fluoroalkyl group having 1 to 12 carbon atoms and having at least one fluorine atom, and R2 represents a hydrogen atom or an acyl group having 2 to 5 carbon atoms, and a polymerization unit derived from a (meth)acrylate represented by the following formula (III):
- where in R5 represents a group dissociated by the action of an acid, and R6 represents a hydrogen atom or a methyl group, and wherein the radiation-sensitive compound is a compound that generates an acid by the action of irradiation and acts in a positive manner.
Dependencies are inferred from the claim text.