Epitaxial oxide films via nitride conversion
AssigneeApplied Thin Films, Inc.
InventorsSankar Sambasivan, Scott A. Barnett, Ilwon Kim, John Rechner
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Abstract
The present invention relates to oxides on suitable substrates, as converted from nitride precursors.
Claims10
An integrated device comprising a composite structure, said structure having a substrate, at least one epitaxial nitride composition deposited on said substrate, said nitride composition partially oxidized, and an electromagnetic film on said composition.
A wound configured composite comprising a substrate and at least one nitride layer thereon, each said nitride layer having a substantially cubic crystalline structure and substantially a crystalline lattice match with at least one of said substrate and another nitride layer, said composite absent a separate metal oxide layer, said composite arranged about an axis perpendicular to said wound configuration.
Dependencies are inferred from the claim text.