Hollow cylindrical cathode sputtering target and process for producing it
AssigneeW.C. Heraeus GmbH
InventorsDavid Lupton, Ralf Heck, Bernd Stenger, Oliver Warkentin
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Abstract
A hollow cylindrical target for a cathode sputtering unit with a hollow cylindrical sputtering material and a target holder is disclosed. The sputtering material has an annular cross section and concentrically surrounds a longitudinal segment of the target holder. The target holder extends out of the sputtering material at least at one end of the target to allow connection to the cathode sputtering unit. The at least one part of the target holder that extends from the sputtering material is a single part that can be detached from the target by at least one screw fitting.
Claims32
A hollow cylindrical target for a cathode sputtering unit, comprising a hollow cylindrical sputtering material;
- and hollow cylindrical target holder, the sputtering material having an annular cross section and being arranged to concentrically surround a longitudinal segment of the target holder so that t least one end of the target holder extends from the sputtering material at least at one en of the target so as to be connectable to the cathode sputtering unit, the at least one end f the target holder that extends from the sputtering material being an individual part that is detachable by at least one screw fitting.
Dependencies are inferred from the claim text.