Optical data storage disk
AssigneeUnaxis Balzers Aktiengesellschaft
InventorsHelfried Weinzerl, Dubs Martin
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Abstract
A sputtering target made of AgxMayMbz or CuxMayMbz, where x>50 at % and Ag or Cu are a first metal, Ma is a second metal and Mb is a third metal is used in a method for manufacturing data storage disks. The method of manufacture includes providing a substrate, providing a spacer layer of a material transmitting light of a selected wavelength onto a surface of the substrate, applying a first layer of a first metal alloy between the substrate and spacer layer, providing a second layer of a second metal alloy on the spacer layer, and depositing the first and second metal alloys so that one of the first and second layers is semi-transparent with respect to the light. The first and second alloys have at least one common metal provided in particular fractions of the alloys.
Claims33
A sputtering target consisting of an alloy CuxMayMbz with x>50 at %, whereby:
- Ma:
- is palladium,
- Mb:
- stands for a third metal, and
- the condition v>z is valid.
A method for manufacturing data storage disks comprising the steps of:
- providing a substrate;
- applying a first layer of a first metal alloy upon the substrate;
- providing a spacer layer of a material which is transmitting light of a selected wavelength upon said first layer;
- providing upon said spacer layer a second layer of a second metal alloy;
- depositing one of said first and second metal alloys of said first and second layers respectively so that said one thereof is semi-transparent with respect to said light;
- providing in said first and second metal alloys at least one same metal with a fraction in each of said alloys of more than 50 at %, and
- when either of said alloys contain gold, the amount of said gold being between 0 and 50 at %.
Dependencies are inferred from the claim text.