Crystal holding apparatus
AssigneeSumitomo Mitsubishi Silicon Corporation
InventorsYoshihiro Akashi, Teruo Kageyama
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Abstract
To miniaturize a crystal holding apparatus which mechanically holds and pulls up a single crystal at a top thereof. To avoid harmful influence on crystal growing resulting from crystal holding. A plurality of pivot clamps 40, 40 are circumferentially mounted at regular intervals on a cylindrical frame 30 which lifts and lowers and rotates for pulling up the single crystal. A clamp operation mechanism 50 is incorporated in the frame 30, which is pushed by a seed chuck 2 lifting in the frame 30 to shift the pivot clamps 40, 40 from an open condition to a close condition. The clamp operation mechanism 50 shifts the pivot clamps 40, 40 from the open condition to close condition when a neck passes inside the pivot clamps 40, 40, and release the pivot clamps 40, 40 after the shift.
Claims12
A crystal holding apparatus which holds and pulls up a single crystal grown by a CZ method at a top thereof, comprising:
- a frame in which a pulling shaft for growing the single crystal is inserted and which lifts and lowers and rotates for pulling up a grown crystal;
- a plurality of pivot clamps which are pivotably mounted to a plurality of circumferential positions on the frame for gripping the top of the grown crystal;
- and
- a clamp operation mechanism which is incorporated in the frame so as to freely lift and lower, and is pushed up by a seed chuck coupled to a bottom of the pulling shaft to be lifted in the frame, and shifts the plurality of pivot clamps from an open condition to a close condition by the lift.
Dependencies are inferred from the claim text.