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US 6,644,938 B2Granted
Turbo molecular pump
AssigneeSeiko Instruments Inc.
InventorHideki Omori
Life of this patent
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Abstract
The present invention provides a turbo molecular pump capable of suppressing temperature rise in an electronic circuit section within a range, without losing airtight property thereof with a simple construction. In a base section of a turbo molecular pump, a bottom portion thereof is sealed by a bottom cover. A semiconductor device is disposed at the inner portion of the bottom cover. A cooling member is provided, which is used for releasing heat of the semiconductor device in an airtight state outside the bottom cover.
Claims8
A turbo molecular pump comprising:
- a rotor blade;
- a magnetic bearing means for supporting the rotor blade with magnetic force and adjusting a position of the rotor blade with respect to its radius direction and/or its axial direction;
- a rotation driving means for conducting rotation driving of the rotor blade;
- a base section disposed at a lower portion of the magnetic bearing means and the rotation driving means and provided with an exhaust port therein;
- a bottom cover for equipping therein and sealing the magnetic bearing means and the rotation driving means at a bottom portion of the base section;
- a semiconductor device disposed at an inner portion of the bottom cover;
- a cooling means for releasing to the outside heat of the semiconductor device;
- and
- a controlling means for controlling rotation of the magnetic bearing means and the rotation driving means.
6 more elements
Dependencies are inferred from the claim text.