System for pumping low thermal conductivity gases
AssigneeAlcatel
InventorMichel Puech
Life of this patent
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Abstract
In a vacuum pumping system according to the invention, the Roots or claw multistage dry primary pump discharges into an outlet stage including an additional piston or membrane pump connected in parallel with a preliminary evacuation pipe including a check valve. The outlet stage very significantly reduces heating of the primary pump and thereby enables the vacuum pumping system to pump efficiently and without damage gases with a low thermal conductivity, such as argon or xenon.
Claims9
A vacuum pumping system including a Roots or claw multistage dry primary pump which has an inlet adapted to receive gases to be pumped and an outlet adapted to discharge pumped gases to the atmosphere or to a pumped gas recycling system, an additional pump which has an inlet connected to said outlet of said primary pump and an outlet that discharges to the atmosphere or to said pumped gas recycling system and is a dry pump that uses a technology other than the Roots or claw technology and is adapted to withstand without damage the temperature increase due to the final compression of the pumped gases, and a preliminary evacuation pipe connected in parallel with said additional pump and including a check valve adapted to pass gases coming from said primary pump.
Dependencies are inferred from the claim text.